A piezoelectric/elastic spring-coupled surface profiler

Sensors and Actuators, A: Physical

Volumn 120, Issue 2, 2005, Pages 317-324

  Chang, S H ^a   Chou, C C ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Electro elasticity; Piezoelectric; Surface profile probe

Indexed keywords

CERAMIC MATERIALS; ELASTICITY; ELECTRIC PROPERTIES; FREQUENCY RESPONSE; MULTILAYERS; PIEZOELECTRIC DEVICES; RESONANCE; SPRINGS (COMPONENTS); SURFACE PROPERTIES;

ELECTRICAL CHARACTERISTICS; ELECTRO-ELASTICITY; PIEZOELECTRIC; SURFACE PROFILE PROBE;

PROFILOMETRY;

EID: 17744377991     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.12.004     Document Type: Article

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