Study of valve-integrated microactuator using homogeneous electro-rheological fluid

Sensors and Materials

Volumn 17, Issue 3, 2005, Pages 97-112

  Yoshida, Kazuhiro ^a   Park, Jung Ho ^b   Yano, Hiroshi ^a,c   Yokota, Shinichi ^a   Yun, Sonam ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b Korea Institute of Machine and Materials   (South Korea)

^c PANASONIC CORPORATION   (Japan)

Author keywords

Diaphragm; ER valve; Functional fluid; Gripper; Homogeneous electro rheological (ER) fluid; Liquid crystal; Microactuator; Micromachine; Micromachining; Polyimide

Indexed keywords

EID: 17744372516     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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