A Novel Profilometer for Nanometric Form Assessment for Large Machined Surfaces

Key Engineering Materials

Volumn 257-258, Issue , 2004, Pages 225-230

  Yang, H ^a   Kim, S ^b   Walker, D ^c  

^a SaTReC Initiative Co Ltd   (South Korea)

^b Yonsei University   (South Korea)

^c UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

Large Machined Surface; Laser Interferometry; Stylus Profilometry; Surface Form

Indexed keywords

ACTUATORS; INTERFEROMETRY; LASER APPLICATIONS; LASER BEAMS; MACHINING; OPTICAL TESTING; PHOTODIODES; SURFACE MEASUREMENT; SYNCHROTRON RADIATION;

LARGE MACHINED SURFACES; LASER INTERFEROMETRY; STYLUS PROFILOMETRY; SURFACE FORMS;

PROFILOMETRY;

EID: 17644436654     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.257-258.225     Document Type: Article

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