Fabrication of compact turning mirrors in silicon-on-insulator materials

Applied Optics

Volumn 44, Issue 12, 2005, Pages 2409-2415

  Wang, Wenhui ^a   Tang, Yanzhe ^b   Li, Tie ^a   Wu, Yarning ^a   Yang, Jianyi ^a,b   Wang, Yuelin ^a,b  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; FABRICATION; INDUCTIVELY COUPLED PLASMA; INTEGRATED OPTICS; OPTICAL WAVEGUIDES; PLASMA ETCHING; SEMICONDUCTING SILICON; SHRINKAGE; SILICON ON INSULATOR TECHNOLOGY; TURNING;

COMPACT TURNING MIRRORS; OPTICAL WAVEGUIDE DEVICES; SILICON-ON-INSULATOR MATERIALS; TWO-STEP METHODS;

MIRRORS;

EID: 17644415340     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.002409     Document Type: Article

References (22)

1. R. Soref and J. Lorenzo, "Single-crystal silicon: a new material for 1.3 and 1.6 μm integrated-optical components," Electron. Lett. 21, 953-954 (1985).
2. P. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, "Silicon-on-insulator phased-array wavelength multi/demultiplexer with extremely low-polarization sensitivity," IEEE Photon. Technol. Lett. 9, 740-942 (1997).
3. X. Jiang, B. Li, Y. Tang, J. Yang, M. Wang, W. Wang, Y. Yang, Y. Wu, and Y. Wang, "Design and fabrication of the star coupler based on SOI material," Chin. Opt. Lett. 1, 465-467 (2003).
4. R. Espinola, M. Tsai, J. Yardley, and R. Osgood, "Fast and low-power thermooptic switch on thin silicon-on-insulator," IEEE Photon. Technol. Lett. 15, 1366-1368 (2003).
5. Y. Sun, X. Jiang, J. Yang, Y. Tang, and M. Wang, "Experimental demonstration of 2-D MMI optical power splitter," Chin. Phys. Lett. 20, 2182-2184 (2003).
6. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004).
7. W. Wang, Y. Tang, Y. Wang, H. Qu, Y. Wu, T. Li, J. Yang, Y. Wang, and M. Liu, "Etched-diffraction-grating-based planar waveguide demultiplexer on silicon-on-insulator," Opt. Quantum Electron. 36, 559-566 (2004).
8. K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, "Silicon-on-insulator-based optical demultiplexer employing turning-mirror-integrated arrayed-waveguide grating," IEEE Photon. Technol. Lett. 17, 378-380 (2005).
9. R. Soref, "Silicon-based optoelectronics," Proc. IEEE 81, 1687-1706 (1993).
10. E. Marcatili, "Bends in optical dielectric waveguides," Bell Syst. Tech. J. 48, 2103-2132 (1969).
11. C. Rolland, G. Mak, K. Fox, D. Adams, A. Springthorpe, D. Yevick, and B. Hermansson, "Analysis of strongly-guiding rib waveguide S-bends: theory and experiment," Electron. Lett. 25, 1256-1257 (1989).
12. 2," IEEE J. Quantum Electron. 27, 1971-1974 (1991).
13. S. P. Pogossian, L. Vescan, and A. Vonsovici, "The single-mode condition for semiconductor rib waveguides with large cross section," J. Lightwave Technol. 16, 1851-1853 (1998).
14. P. Buchmann and H. Kaufmann, "GaAs single-mode rib waveguides with reactive ion-etched totally reflecting corner mirrors," J. Lightwave Technol. 3, 785-788 (1985).
15. Y. Chung and N. Dagli, "Experimental and theoretical study of turning mirrors and beam splitters with optimized waveguide structures," Opt. Quantum Electron. 27, 395-403 (1995).
16. L. Faustini, C. Coriasso, A. Stano, C. Cacciatore, and D. Campi, "Loss analysis and interference effect in semiconductor integrated waveguide turning mirrors," IEEE Photon. Technol. Lett. 8, 1355-1357 (1996).
17. R. Ahmad, F. Pizzuto, G. Gamara, R. Espinola, H. Rao, and R. Osgood, "Ultracompact corner-mirrors and T-branches in silicon-on-insulator," IEEE Photon. Technol. Lett. 14, 65-67 (2002).
18. Y. Tang, W. Wang, T. Li, and Y. Wang, "Integrated waveguide turning mirror in silicon-on-insulator," IEEE Photon. Technol. Lett. 14, 68-70 (2002).
19. N. Maluf, An Introduction to Microelectromechanical System-Engineering (Artech House, Boston, Mass., 2000).
20. S. Chuang and J. Kong, "Scattering of waves from periodic surfaces," Proc. IEEE 69, 1132-1144 (1984).
21. A. Taflove and S. Hagness, Computational Electrodynamics: The Finite-Difference Time-Domain Method, 2nd ed. (Artech House, Boston, Mass., 2000).
22. S. M. Lee, W. C. Chew, M. Moghaddam, M. A. Nasir, S. Chuang, R. W. Herrick, and C. L. Balestra, "Modeling of roughsurface effects in an optical turning mirror using the finite-difference time-domain method," J. Lightwave Technol. 9, 1471-1479 (1991).