Optical properties of TiO 2-x thin films studied by spectroscopic ellipsometry: Substrate temperature effect

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5622, Issue PART 2, 2004, Pages 545-550

  Camacho Lopez M A ^a   Sanchez Perez C ^b   Esparza, A ^b   Ghibaudo, E ^b   Rodil, S ^b   Muhl, S ^b   Escobar Alarcon L ^c  

^a UNIVERSIDAD AUTÓNOMA DEL ESTADO DE MÉXICO   (Mexico)

^b UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

^c NONE

Author keywords

Optical constants; Thin films; Titanium oxide

Indexed keywords

BAND GAP; GLASS SUBSTRATES; OPTICAL CONSTANTS; SUBSTRATE TEMPERATURE EFFECTS;

ARGON; CRYSTALLIZATION; ELLIPSOMETRY; FUSED SILICA; MAGNETRON SPUTTERING; MIXTURES; OPTICAL PROPERTIES; OXYGEN; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS; THERMAL EFFECTS; THIN FILMS; ULTRAVIOLET SPECTROMETERS;

TITANIUM OXIDES;

EID: 17644407005     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.590793     Document Type: Conference Paper

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