The thermodynamic assessment of the Ti-Si-N system and the interfacial reaction analysis

Journal of Alloys and Compounds

Volumn 394, Issue 1-2, 2005, Pages 138-147

  Ma, Xiaoyan ^a   Li, Changrong ^a   Zhang, Weijing ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

Assessment; Phase diagram; Phase formation sequence; Ti Si N ternary

Indexed keywords

CUTTING TOOLS; GIBBS FREE ENERGY; INTERFACES (MATERIALS); INTERMETALLICS; PHASE DIAGRAMS; PHASE TRANSITIONS; SILICON NITRIDE; SOLID SOLUTIONS; STOICHIOMETRY; THERMODYNAMICS; TITANIUM NITRIDE;

ASSESSMENT; INTERFACIAL REACTIONS; PHASE FORMATION SEQUENCE; TI-SI-N TERNARY;

TERNARY SYSTEMS;

EID: 17644396016     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2004.09.027     Document Type: Article

References (34)

1. H. Ichimura, and A. Kawana J. Mater. Res. 8 1993 1093 1100
2. L. Rebouta, F. Vaz, M. Andritschky, and M.F. Silva Surf. Coat. Technol. 76/77 1995 70 74
3. S. Li, Y. Shi, and H. Peng Plasma Chem. Plasma Proc. 12 1992 287 297
4. K.H. Kim, S. Choi, and S. Yoon Surf. Coat. Technol. 161 2002 243 248
5. H. Watanabe, Y. Sato, C. Nie, A. Ando, S. Ohtani, and N. Iwamoto Surf. Coat. Technol. 169/170 2003 452 455
6. W.J. Meng, X.D. Zhang, B. Shi, J.C. Jiang, L.E. Rehn, P.M. Baldo, and R.C. Tittsworth Surf. Coat. Technol. 163/164 2003 251 259
7. M. Paulasto, J.K. Kivilahti, and F.J.J. van Loo J. Appl. Phys. 77 1995 4412 4416
8. I. Gotman, and E.Y. Gutmanas J. Mater. Sci. Lett. 9 1990 813 815
9. H. Seifert System Si-Ti, COST507 I. Ansara A.T. Dinsdale M.H. Rand Thermochemical Database for Light Metal Alloys 1998 European Commission Luxembourg
10. X. Ma, C. Li, and F. Wang CALPHAD 27 2003 383 388
11. S. Jonsson Z. Metallkd. 87 1996 691 702
12. H. Ohtani, and M. Hillert CALPHAD 14 1990 289 306
13. K. Zeng, and R. Schmid-Fetzer Z. Metallkd. 87 1996 540 554
14. S. Jonsson Z. Metallkd. 87 1996 713 720
15. S. Jonsson Z. Metallkd. 87 1996 784 787
16. S. Jonsson Z. Metallkd. 87 1996 788 795
17. C.Y. Ting J. Vac. Sci. Technol. 21 1982 14 18
18. Yu.S. Borisov, A.L. Borisova, Yu.A. Kocherzhinskii, and E.A. Shishkin Poroshk. Metall. 17 1978 63 69
19. S.B. Desu, and J.A. Taylor J. Am. Ceram. Soc. 73 1990 509 515
20. I. Barin, and O. Knacke Thermochemical Properties of Inorganic Substances 1973/1977 Springer Berlin
21. R. Beyers, and R. Sinclair J. Vac. Sci. Technol. B 2 1984 781 784
22. W. Wakelkamp, Ph.D. Thesis, University of Eindhoven, Eindhoven, The Netherlands, 1991.
23. S. Sambasivan, and W.T. Petuskey J. Mater. Res. 9 1994 2362 2369
24. P. Rogl J.C. Shuster Phase Diagrams of Ternary Boron Nitride and Silicon Systems 1992 ASM International Materials Park, OH
25. A.T. Dinsdale CALPHAD 15 1991 317
26. SGTE Substance Database, Royal Institute of Technology, Sweden, 1994.
27. M.W. Chase NIST-JANAF Thermochemical Tables 4th ed. 1998 American Institute of Physics for the National Institute of Standards and Technology
28. O. Redlich, and A.T. Kister Ind. Eng. Chem. 40 1948 345 348
29. M. Hillert, and L.I. Staffansson Acta Chem. Scand. 24 1970 3618 3626
30. T. Hahn International Tables for Crystallography 1983 Reidel
31. B. Aronsson Acta Chem. Scand. 12 1958 31 37
32. W.J.J. Wakelkamp, F.J.J. Van Loo, and R. Metselaar J. Eur. Ceram. Soc. 8 1991 135 139
33. Y. Du, J.C. Schuster, H.J. Seifert, and F. Aldinger J. Am. Ceram. Soc. 83 1 2000 197 203
34. B. Sundman, S. Jansson, and J.O. Anderson CALPHAD 9 1985 153 190