Thermodynamic assessment of the Si-N system

Calphad: Computer Coupling of Phase Diagrams and Thermochemistry

Volumn 27, Issue 4, 2003, Pages 383-388

  Ma, Xiaoyan ^a   Li, Changrong ^a   Wang, Fuming ^a   Zhang, Weijing ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

Assessment; Phase diagram; Si N binary

Indexed keywords

CRYSTAL STRUCTURE; DIELECTRIC MATERIALS; DIFFUSION; EUTECTICS; GIBBS FREE ENERGY; HIGH PRESSURE EFFECTS; INTERMETALLICS; OPTIMIZATION; PHASE DIAGRAMS; SOLUTIONS; STOICHIOMETRY; THERMODYNAMICS;

DIFFUSION BARRIERS; MELTING POINTS; SI-N BINARY; THERMODYNAMIC ASSESSMENT;

SILICON NITRIDE;

EID: 2442535187     PISSN: 03645916     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.calphad.2003.12.005     Document Type: Article

References (31)

1. J.D. Wu, J. Sun, X.X. Zhong, Z.Y. Zhou, C.Z. Wu, P.M. Li, Thin Solid Films 350 (1999) 101-105.
2. M. Paulasto, J.K. Kivilahti, F.J.J. Van Loo, J. Appl. Phys. 77 (1995) 4412-4416.
3. C. Melandri, M.G. Gee, G. De Portu, S. Guicciardi, Tribol. Int. 28 (1995) 403-413.
4. M. Hillert, S. Jonsson, B. Sundman, Z. Metallkd 83 (1992) 648-654.
5. L. Kaufman, H. Bernstein, Computer Calculation of Phase Diagram, Academic Press, New York, London, 1970.
6. A.T. Dinsdale, Calphad 15 (1991) 317.
7. B. Sundman, B. Jansson, J.O. Andersson, Calphad 9 (1985) 153-190.
8. J. Unland, B. Onderka, A. Davydov, R. Schmid-Fetzer, J. Crystal Growth 256 (2003) 33-51.
9. B. Onderka, J. Unland, R. Schmid-Fetzer, J. Mater. Res. 17 (2002) 3065-3083.
10. W. Kaiser, C.K. Thurmond, J. Appl. Phys. 30 (1959) 427-431.
11. Y. Yatsurugi, N. Akiyama, Y. Endo, J. Electrochem. Soc. 120 (1973) 975-979.
12. J.M. Arrowsmith, J. Iron Steel Inst. 201 (1963) 699-701.
13. E. Hengge, Z. Anorg. Allg. Chem. 315 (1962) 298-304 (in German).
14. E. Wiberg, H. Michaud, Z. Naturforsch. B 500 (1954) 495-496 (in German).
15. S.N. Ruddlesden, P. Popper, Acta Crystallogr. 11 (1958) 465-468.
16. R. Marchand, Y. Laurent, J. Lang, M. Th, Le Bihan, Acta Crystallogr. B B25 (1969) 2157-2160 (in French).
17. I. Kohatsu, J.W. McCauley, Mat. Res. Bull. 9 (1974) 917-920.
18. K. Kato, Z. Inoue, K. Kijima, I. Kasada, H. Tanaka, J. Am. Ceram. Soc. 58 (1975) 90-91.
19. R. Grün, Acta Crystallogr. B 35 (1979) 800-804.
20. K. Biegen, Ph.D. Thesis, Equilibria and kinetics in systems Si-N, Si-O-N and Si-C-O-N, Lab. Silicate Sci., Norwegian Inst. Techn., Univ. of Trondheim, Norway, 1976.
21. R.D. Pehlke, J.F. Elliott, Trans. Metall. Soc. AIME 215 (1959) 781-785.
22. M.W. Chase, NIST-JANAF Thermochemical Tables, fourth ed., American Institute of Physics for the National Institute of Standards and Technology, c1998.
23. A. Hendry, in: F.L. Riley (Ed.), Nitrogen Ceramics, Intern. Publ., Reading, MA, 1977, pp. 183-185.
24. I. Ya. Guzman, A.F. Demidenko, V.I. Koshchenko, M.S. Fraifel'd, Yu.V. Egner, Izvestiya Akademii Nauk SSSR, Neorg. Mater. 12 (1976) 1879-1881 (in Russian).
25. V.I. Koshchenko, Ya. Kh. Grinberg, R.V. Koshchenko, Izvestiya Akademii Nauk SSSR, Neorg. Mater. 21 (1985) 244-248 (in Russian).
26. L. Kaufman, Calphad 3 (1979) 275-291.
27. P. Dörner, L.J. Gauckler, H. Krieg, H.L. Lukas, G. Petzow, J. Weiss, J. Mater. Sci. 16 (1981) 935-943.
28. W.B. Hincke, L.R. Brantley, J. Am. Chem. Soc. 52 (1930) 48-52.
29. SGTE Substance Database, Royal Institute of Technology, Sweden, 1994.
30. O. Redlich, A.T. Kister. Ind. Eng. Chem. 40 (1948) 345-348.
31. B. Sundman, S. Jansson, J.O. Anderson, Calphad 9 (1985) 153-190.