Dynamically forced cantilever system: A piezo-polymer characterization tool with possible application for micromechanical HF resonator devices

Review of Scientific Instruments

Volumn 76, Issue 4, 2005, Pages

  Schwödiauer, Reinhard ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER DISPLACEMENT; CANTILEVER SYSTEMS; ELECTRO-ACTIVE POLYMERS; NONREFLECTIVE SURFACES;

ACTUATORS; ATOMIC FORCE MICROSCOPY; ELECTRIC FIELDS; ELECTROSTRICTION; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; OSCILLATIONS; PIEZOELECTRIC DEVICES; RESONATORS; SPIN COATING;

CANTILEVER BEAMS;

EID: 17644374097     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1884185     Document Type: Article

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