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Volumn 41, Issue 7, 2005, Pages 446-447

High performance MEMS inductors fabricated on localised and planar thick SiO 2 layer

Author keywords

[No Author keywords available]

Indexed keywords

SELF-RESONANCE FREQUENCY; SILICON DEEP ETCHING AND OXIDATION (SIDEOX); SPIRAL INDUCTORS; THERMAL OXIDATION;

EID: 17444432890     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20050086     Document Type: Article
Times cited : (17)

References (7)
  • 1
    • 0025474604 scopus 로고
    • Si IC-compatible inductors and LC passive filters
    • Nguyen, N., and Meyer, R.G.: 'Si IC-compatible inductors and LC passive filters', IEEE J. Solid-State Circuits, 1990, 25, (4), pp. 1028-1031
    • (1990) IEEE J. Solid-state Circuits , vol.25 , Issue.4 , pp. 1028-1031
    • Nguyen, N.1    Meyer, R.G.2
  • 2
    • 0032276250 scopus 로고    scopus 로고
    • Progress in RF inductors on silicon-understanding substrate losses
    • Burghart, J.: 'Progress in RF inductors on silicon-understanding substrate losses', Tech. Dig. IEDM, 1998, pp. 523-526
    • (1998) Tech. Dig. IEDM , pp. 523-526
    • Burghart, J.1
  • 3
    • 0036197724 scopus 로고    scopus 로고
    • Fabrication of thick silicon dioxide layers using DRIE, oxidation and trench refill
    • Zhang, C., and Najafi, K.: 'Fabrication of thick silicon dioxide layers using DRIE, oxidation and trench refill'. Proc. 15th IEEE Int. Conf. MEMS, 2002, pp. 160-163
    • (2002) Proc. 15th IEEE Int. Conf. MEMS , pp. 160-163
    • Zhang, C.1    Najafi, K.2
  • 4
    • 0037204064 scopus 로고    scopus 로고
    • Monolithic transformer with underlying deep silicon-oxide block
    • Jiang, H., and Tien, N.C.: 'Monolithic transformer with underlying deep silicon-oxide block', Electron. Lett., 2002, 38, (3), pp. 142-144
    • (2002) Electron. Lett. , vol.38 , Issue.3 , pp. 142-144
    • Jiang, H.1    Tien, N.C.2
  • 5
    • 0034427508 scopus 로고    scopus 로고
    • On-chip spiral inductors suspended over deep copper-lined cavities
    • Jiang, H., Wang, Y., Yeh, J.-L.A., and Tien, N.C.: 'On-chip spiral inductors suspended over deep copper-lined cavities', IEEE Trans. Micro. Theory Tech., 2000, 48, (12), pp. 2415-2423
    • (2000) IEEE Trans. Micro. Theory Tech. , vol.48 , Issue.12 , pp. 2415-2423
    • Jiang, H.1    Wang, Y.2    Yeh, J.-L.A.3    Tien, N.C.4
  • 6
    • 0037666374 scopus 로고    scopus 로고
    • One-mask process for silicon accelerometers on Pyrex glass utilising notching effect in inductively coupled plasma DRIE
    • Iliescu, C., and Miao, J.: 'One-mask process for silicon accelerometers on Pyrex glass utilising notching effect in inductively coupled plasma DRIE', Electron. Lett., 2003, 39, (8), pp. 658-659
    • (2003) Electron. Lett. , vol.39 , Issue.8 , pp. 658-659
    • Iliescu, C.1    Miao, J.2
  • 7
    • 0035370572 scopus 로고    scopus 로고
    • Study of deep silicon etching for micro-gyroscope fabrication
    • Fu, L., Miao, J.M., Li, X.X., and Lin, R.M.: 'Study of deep silicon etching for micro-gyroscope fabrication', Appl. Surf. Sci., 2001, 177, (1-2), pp. 78-84
    • (2001) Appl. Surf. Sci. , vol.177 , Issue.1-2 , pp. 78-84
    • Fu, L.1    Miao, J.M.2    Li, X.X.3    Lin, R.M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.