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Volumn 41, Issue 7, 2005, Pages 446-447
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High performance MEMS inductors fabricated on localised and planar thick SiO 2 layer
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Author keywords
[No Author keywords available]
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Indexed keywords
SELF-RESONANCE FREQUENCY;
SILICON DEEP ETCHING AND OXIDATION (SIDEOX);
SPIRAL INDUCTORS;
THERMAL OXIDATION;
FABRICATION;
MICROELECTROMECHANICAL DEVICES;
NATURAL FREQUENCIES;
OXIDATION;
PHOTORESISTS;
REACTIVE ION ETCHING;
SILICA;
SUBSTRATES;
THICK FILMS;
ELECTRIC INDUCTORS;
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EID: 17444432890
PISSN: 00135194
EISSN: None
Source Type: Journal
DOI: 10.1049/el:20050086 Document Type: Article |
Times cited : (17)
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References (7)
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