Monolithic transformer with underlying deep silicon-oxide block

Electronics Letters

Volumn 38, Issue 3, 2002, Pages 142-144

  Jiang, H ^a   Tien, N C ^b  

^a Cornell University   (United States)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CHEMICAL MECHANICAL POLISHING; CMOS INTEGRATED CIRCUITS; EDDY CURRENTS; ELECTRIC LOSSES; IMPEDANCE MATCHING (ELECTRIC); MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; NATURAL FREQUENCIES; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS;

ELECTROMAGNETIC COUPLING; MONOLITHIC TRANSFORMER; RADIO FREQUENCY CIRCUITS; SILICON OXIDE;

ELECTRIC TRANSFORMERS;

EID: 0037204064     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20020085     Document Type: Article

References (4)

1. Monolithic transformers and their application in a differential CMOS RF low-noise amplifier
2. Monolithic transformers for silicon RF IC design
3. Stacked inductors and transformers in CMOS technology
4. Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator