-
1
-
-
0022594923
-
Hydrogen in low-pressure chemical-vapor-deposited silicon (oxy)nitride films
-
F.H.P.M. Habraken, R.H.G. Tijhaar, W.F. van der Weg, A.E.T. Kuiper and M.F.C. Willemsen "Hydrogen in low-pressure chemical-vapor-deposited silicon (oxy)nitride films", Journal of Applied Physics 59 (2):447, (1986).
-
(1986)
Journal of Applied Physics
, vol.59
, Issue.2
, pp. 447
-
-
Habraken, F.H.P.M.1
Tijhaar, R.H.G.2
Van Der Weg, W.F.3
Kuiper, A.E.T.4
Willemsen, M.F.C.5
-
2
-
-
0020721235
-
Post-deposition high temperature processing of silicon nitride
-
H.J. Stein, P.S. Peercy and R.J. Sokel "Post-deposition high temperature processing of silicon nitride", Thin Solid Films 101:291, (1983)
-
(1983)
Thin Solid Films
, vol.101
, pp. 291
-
-
Stein, H.J.1
Peercy, P.S.2
Sokel, R.J.3
-
3
-
-
6444221486
-
Oxide / LPCVD nitride stacks on silicon: The effects of high temperature treatments on bulk lifetime and on surface passivation
-
Munich
-
M.J. McCann, K.J. Weber, M.J. Stocks and A.W. Blakers Oxide / LPCVD Nitride Stacks on Silicon: The Effects of High Temperature Treatments on Bulk Lifetime and on Surface Passivation. 17th EC PV Conference, Munich, 1708-1711(2001).
-
(2001)
17th EC PV Conference
, pp. 1708-1711
-
-
McCann, M.J.1
Weber, K.J.2
Stocks, M.J.3
Blakers, A.W.4
-
4
-
-
0000513411
-
Contactless determination of current-voltage characteristics and minority-carrier lifetimes in semiconductors from quasi-steady-state photo-conductance data
-
R.A. Sinton and A. Cuevas "Contactless determination of current-voltage characteristics and minority-carrier lifetimes in semiconductors from quasi-steady-state photo-conductance data" Applied Physics Letters, 69 (17):2510, (1996).
-
(1996)
Applied Physics Letters
, vol.69
, Issue.17
, pp. 2510
-
-
Sinton, R.A.1
Cuevas, A.2
-
5
-
-
0000612857
-
Generalised analysis of quasi-steady-state and quasi-transient measurements of carrier lifetimes in semiconductors
-
H. Nagel, C. Berge and A.G. Aberle "Generalised analysis of quasi-steady-state and quasi-transient measurements of carrier lifetimes in semiconductors", Journal of Applied Physics 86(11):6218, (1999).
-
(1999)
Journal of Applied Physics
, vol.86
, Issue.11
, pp. 6218
-
-
Nagel, H.1
Berge, C.2
Aberle, A.G.3
-
6
-
-
0001680690
-
Dynamic behaviour of hydrogen in silicon nitride and oxy-nitride films made by low-pressure chemical vapour deposition
-
W.M. Arnoldbik, C.H.M. Maree, A.J.H. Maas, M.J. van Boogaard, R.H.P.M. Habraken and A.E.T. Kuiper "Dynamic behaviour of hydrogen in silicon nitride and oxy-nitride films made by low-pressure chemical vapour deposition", Physical. Review. B, 48 (8):5444, (1993).
-
(1993)
Physical. Review. B
, vol.48
, Issue.8
, pp. 5444
-
-
Arnoldbik, W.M.1
Maree, C.H.M.2
Maas, A.J.H.3
Van Boogaard, M.J.4
Habraken, R.H.P.M.5
Kuiper, A.E.T.6
-
7
-
-
0342882187
-
Stability of hydrogen in silicon nitride films deposited by low-pressure and plasma enhanced chemical vapour deposition techniques
-
Joseph Z. Xie, Shyam P. Murarka, Xin S. Guo and William A. Landord "Stability of hydrogen in silicon nitride films deposited by low-pressure and plasma enhanced chemical vapour deposition techniques" Journal of Vacuum Science and Technology B 7(2) (1989)
-
(1989)
Journal of Vacuum Science and Technology B
, vol.7
, Issue.2
-
-
Xie, J.Z.1
Murarka, S.P.2
Guo, X.S.3
Landord, W.A.4
-
8
-
-
0017506253
-
Chemically bound hydrogen in CVD Si3N4: Dependence on NH3/SiH4 ration and on annealing
-
H.J. Stein and H.A.R. Wegener "Chemically bound hydrogen in CVD Si3N4: Dependence on NH3/SiH4 ration and on annealing", Solid State Science and Technology, 124(6) (1977)
-
(1977)
Solid State Science and Technology
, vol.124
, Issue.6
-
-
Stein, H.J.1
Wegener, H.A.R.2
|