SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 2, 2005, Pages 1076-1080

Properties and applications of a modified dielectric barrier discharge generated at atmospheric pressure

(2) Lee, Yong Hyuk a Yeom, Geun Young a

a Sungkyunkwan University (South Korea)

Author keywords

Atmospheric pressure plasma; DBD; He O2

Indexed keywords

ATMOSPHERIC PRESSURE; DIELECTRIC MATERIALS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTRODES; ETCHING; HELIUM; OXYGEN; PHOTORESISTS;

ATMOSPHERIC PRESSURE PLASMAS; DBD; DIELECTRIC BARRIER DISCHARGES; HE/O2;

PLASMAS;

EID: 17444423287 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.44.1076 Document Type: Article

Times cited : (12)

References (15)

1
- 0036670690
- J. Schmitt, M. Elyaakoubi and L. Sansonnens: Plasma Sources Sci. Technol. 11 (2002) A206.
- (2002) Plasma Sources Sci. Technol. , vol.11
- Schmitt, J.¹ Elyaakoubi, M.² Sansonnens, L.³

2
- 0035465659
- Y. H. Lee, C. H. Yi, M. J. Chung and G. Y. Yeom: Surf. Coat. Technol. 146 (2001) 474.
- (2001) Surf. Coat. Technol. , vol.146 , pp. 474
- Lee, Y.H.¹ Yi, C.H.² Chung, M.J.³ Yeom, G.Y.⁴

3
- 0037566073
- C. H. Yi, Y. H. Lee and G. Y. Yeom: Surf. Coat. Technol. 171 (2003) 237.
- (2003) Surf. Coat. Technol. , vol.171 , pp. 237
- Yi, C.H.¹ Lee, Y.H.² Yeom, G.Y.³

4
- 84899927019
- S. Kanazawa, M. Kogoma, T. Moriwaki and S. Okazaki: J. Phys. D 21 (1988) 838.
- (1988) J. Phys. D , vol.21 , pp. 838
- Kanazawa, S.¹ Kogoma, M.² Moriwaki, T.³ Okazaki, S.⁴

5
- 0842290115
- S. Y. Moon, W. Choe and B. K. Kang: Appl. Phys. Lett. 84 (2004) 188.
- (2004) Appl. Phys. Lett. , vol.84 , pp. 188
- Moon, S.Y.¹ Choe, W.² Kang, B.K.³

6
- 0037454454
- H. E. Wagner, R. Brandenburg, K. V. Kozlov, A. Sonnenfeld, P. Michel and J. F. Behnke: Vacuum 71 (2003) 417.
- (2003) Vacuum , vol.71 , pp. 417
- Wagner, H.E.¹ Brandenburg, R.² Kozlov, K.V.³ Sonnenfeld, A.⁴ Michel, P.⁵ Behnke, J.F.⁶

7
- 0037150101
- Y. B. Golubovskii, V. A. Maiorov, J. Behnke and J. F. Behnke: J. Phys. D 35 (2002) 751.
- (2002) J. Phys. D , vol.35 , pp. 751
- Golubovskii, Y.B.¹ Maiorov, V.A.² Behnke, J.³ Behnke, J.F.⁴

8
- 4644316900
- F. Massines, P. Segur, N. Gherardi, C. Khamphan and A. Richard: Surf. Coat. Technol. 174 (2003) 8.
- (2003) Surf. Coat. Technol. , vol.174 , pp. 8
- Massines, F.¹ Segur, P.² Gherardi, N.³ Khamphan, C.⁴ Richard, A.⁵

9
- 79955999186
- M. Simor, J. Rahel, P. Vojtek and M. Cernak: Appl. Phys. Lett. 81 (2002) 2716.
- (2002) Appl. Phys. Lett. , vol.81 , pp. 2716
- Simor, M.¹ Rahel, J.² Vojtek, P.³ Cernak, M.⁴

10
- 0034247479
- N. Gherardi, G. Gouda, E. Gat, A. Ricard and F. Massines: Plasma Sources Sei. Technol. 9 (2000) 340.
- (2000) Plasma Sources Sei. Technol. , vol.9 , pp. 340
- Gherardi, N.¹ Gouda, G.² Gat, E.³ Ricard, A.⁴ Massines, F.⁵

11
- 0035362125
- N. Gherardi and F. Massines: IEEE Trans. Plasma Sci. 29 (2001) 536.
- (2001) IEEE Trans. Plasma Sci. , vol.29 , pp. 536
- Gherardi, N.¹ Massines, F.²

12
- 0032022902
- F. Massines, A. Rabehi, P. Decomps, R. B. Gadri, P. Segur and C. Mayoux: J. Appl. Phys. 83 (1998) 2950.
- (1998) J. Appl. Phys. , vol.83 , pp. 2950
- Massines, F.¹ Rabehi, A.² Decomps, P.³ Gadri, R.B.⁴ Segur, P.⁵ Mayoux, C.⁶

13
- 0035971685
- K. Takaki, D. Taguchi and T. Fujiwara: Appl. Phys. Lett. 78 (2001) 2646.
- (2001) Appl. Phys. Lett. , vol.78 , pp. 2646
- Takaki, K.¹ Taguchi, D.² Fujiwara, T.³

14
- 0003740710
- American Vacuum Society Classics, USA
- S. C. Brown: Basic Data of Plasma Physics (American Vacuum Society Classics, USA, 1994).
- (1994) Basic Data of Plasma Physics
- Brown, S.C.¹

15
- 0035250754
- Y. Yourdshahyan, B. Razaznejad and B. I. Lundqvist: Solid State Commun. 117 (2001) 531.
- (2001) Solid State Commun. , vol.117 , pp. 531
- Yourdshahyan, Y.¹ Razaznejad, B.² Lundqvist, B.I.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.