Phase decomposition and dielectric properties of reactively sputtered bismuth zinc niobate pyrochlore thin films deposited from monoclinic zirconolite target

Journal of Electroceramics

Volumn 14, Issue 3, 2005, Pages 171-175

  Ko, Kyung Hyun ^a   Back, Dong Hyuk ^a   Hong, Young Pyo ^a   Moon, Joong Ho ^a  

^a Ajou University   (South Korea)

Author keywords

Dielectric properties; Pyrochlore; Sputtering; Tunability

Indexed keywords

DIELECTRIC MATERIALS; DIELECTRIC PROPERTIES; MAGNETRON SPUTTERING; PERMITTIVITY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM COMPOUNDS;

MONOCLINIC TARGETS; PYROCHRLORE; TUNABILITY; TUNABLE DIELECTRIC MATERIALS;

BISMUTH COMPOUNDS;

EID: 17444365802     PISSN: 13853449     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10832-005-0955-6     Document Type: Article

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