The effect of substrate heating on the tunability of rf-sputtered Bi 2O3-ZnO-Nb2O5 thin films

Applied Physics A: Materials Science and Processing

Volumn 80, Issue 3, 2005, Pages 585-590

  Ha, S ^a   Lee, Y S ^a   Hong, Y P ^a   Lee, H Y ^a   Lee, Y C ^a   Ko, K H ^a   Kim, D W ^b   Hong, H B ^b   Hong, K S ^b  

^a Ajou University   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BISMUTH COMPOUNDS; CRYSTALLINE MATERIALS; DIELECTRIC PROPERTIES; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; STOICHIOMETRY; SUBSTRATES; ZINC COMPOUNDS;

METALORGANIC DEPOSITION (MOD); PYROCHLORE PHASE; RF-MAGNETRON SPUTTERING; TUNABILITY;

THIN FILMS;

EID: 10844265385     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-003-2233-2     Document Type: Article

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