Rapid deep micromachining of polytetrafluoroethylene by MeV ion bombardment in oxygen-rich atmospheres

Journal of Micromechanics and Microengineering

Volumn 15, Issue 4, 2005, Pages 698-701

  Gomez Morilla, I ^a   Sofield, C J ^a   Grime, G W ^a   Gwilliam, R ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DEGRADATION; DRY ETCHING; ETCHING; ION BOMBARDMENT; IRRADIATION; MELTING; MICROSTRUCTURE; OXYGEN; POLYTETRAFLUOROETHYLENES; VACUUM APPLICATIONS;

LIGHT IONS; OXYGEN-RICH ATMOSPHERES; RAPID DEEP MICROMACHINING; RAPID DIRECT ETCHING;

MICROMACHINING;

EID: 17444363418     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/4/004     Document Type: Article

References (10)

1. Clark D T and Brennan W J 1986 An esca investigation of low energy electron beam interactions with polymers. I. PTFE J. Electron Spectrosc. Relat. Phenom. 41 399-410
2. Gilmore I S and Seah M P 2002 Electron flood gun damage in the analysis of polymers and organics in time-of-flight SIMS Appl. Surf. Sci. 187 89-100
3. Lee L P et al 1998 High aspect ratio polymer microstructures and cantilevers for bioMEMS using low energy ion beam and photolithography Sensors Actuators A 71 144-9
4. Katoh T et al 2001 Direct writing for three-dimensional microfabrication using synchrotron radiation etching Sensors Actuators A 89 10-5
5. Torrisi L, Calcagno L and Foti A M 1988 MeV helium ion beam etching of polytetrafluoroethylene Nucl. Instrum. Methods Phys. Res. B B32 142-4
6. Gomez -Morilla I 2004 An Investigation of Novel Processes for Microlithography Using MeV Ion Beams Department of Materials, University of Oxford
7. Grime G W, Abraham M H and Marsh M A 2001 The new external beam facility of the Oxford scanning proton microprobe Nucl. Instrum. Methods Phys. Res. B 181 66-70
8. Grime G W et al 1991 The Oxford submicron nuclear microscopy facility Nucl. Instrum. Methods Phys. Res. B 54 52-63
9. Sealy B J et al 1995 Recent developments in the use of ion beams at Surrey Nucl. Instrum. Methods Phys. Res. B 99 580-2
10. Macaulay-Newcombe R G et al 2004 W erosion due to low energy O+ and D+ impact J. Nucl. Mater. 327 114-20