High aspect ratio polymer microstructures and cantilevers for bioMEMS using low energy ion beam and photolithography

Sensors and Actuators, A: Physical

Volumn 71, Issue 1-2, 1998, Pages 144-149

  Lee, L P ^a   Berger, S A ^a,b   Liepmann, D ^b   Pruitt, L ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Biomedical microelectromechanical systems (BioMEMS); High aspect ratio polymer microstructures; Ion beam; Photolithography

Indexed keywords

ASPECT RATIO; BIOMEDICAL ENGINEERING; FLUORINE CONTAINING POLYMERS; ION BEAM LITHOGRAPHY; MICROCIRCULATION; PHOTOLITHOGRAPHY;

BIOMEDICAL MICROELECTROMECHANICAL SYSTEMS; HIGH ASPECT RATIO POLYMERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032208728     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00177-0     Document Type: Article

References (19)

1. R.T. Howe, J. Vac, Sci. Technol. B 6 (1988) 1809.
2. K.S.J. Pister, M.W. Judy, S.R. Burgett, R.S. Fearing, Sensors and Actuators 33 (1992) 249.
3. L.Y. Lin, S.S. Lee, K.S.J. Pister, M.C. Wu, IEEE Photon. Technol. Lett. 6 (12) (1994) 1445-1447.
4. P.N. Prasad (Ed.), Frontiers of Polymers and Advanced Materials, Plenum, New York, 1994.
5. N.F. Sheppard Jr., M.J. Lesho, P. McNally, A.S. Francomacaro, Sensors and Actuators B 28 (1995) 95-102.
6. A. van den Berg, A. Grisel, E. Verney-Norberg, Sensors and Actuators B 4 (1991) 235-238.
7. W.K. Fisher, J.C. Corelli, J. Polymer Sci. 19 (1981) 2465.
8. R. Michael, D. Stulik, J. Vac. Sci. Technol. A 4 (1986) 1861.
9. C.-A. Chang, J.E.E. Baglin, A.G. Schrott, K.C. Lin, Appl. Phys. Lett. 51 (1987) 103.
10. C.-A. Chang, Appl. Phys. Lett. 51 (1987) 1236.
11. D.R. Wheeler, S.V. Pepper, J. Vac. Sci. Technol. 20 (1982) 442.
12. J.-U. Meyer, M. Biel, J. Micromech. Microeng. 5 (1995) 172-174.
13. O. Solgaard, M.J. Daneman, N.C. Tien, A. Friedberger, R.S. Muller, K.Y. Lau, IEEE Photon. Technol. Lett. 7 (1) (1995) 41-43.
14. C.E. Garner, S.B. Gabriel, Y.S. Kuo, Thin Solid Films 95 (1982) 351-362.
15. E. Berenschot, H. Jansen, G.-J. Burger, H. Gardeniers, M. Elwenspoek, Proceeding of IEEE, Ninth International Workshop on Micro Electromechanical Systems, 1996, pp. 277-284.
16. J.L. Vossen, W. Kern, Thin Film Process, Academic Press, London, 1978.
17. P.G. Gloerson, J. Vac. Sci. Technol. 12 (1975) 28.
18. S. Somekh, J. Vac. Sci. Technol. 13 (1976) 1003.
19. P. Sigmund, Phys. Rev. 184 (1969) 383.