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Applied Surface Science

Volumn 127-129, Issue , 1998, Pages 553-558

Synthesis of carbon films using pulsed laser deposition method with frozen CH 4 and CO 2 targets

(3) Ishiguro, Takashi a Esaki, Kotaro a Hiroshima, Yasushi b

a NAGAOKA UNIVERSITY OF TECHNOLOGY (Japan)

b Appl Laser Eng Research Institute (Japan)

Author keywords

Diamond like carbon; KrF excimer laser; PLD; Pulsed laser deposition; Thin film

Indexed keywords

CARBON DIOXIDE; DIAMOND FILMS; EXCIMER LASERS; METHANE; PULSED LASER APPLICATIONS; RAMAN SPECTROSCOPY; SYNTHESIS (CHEMICAL); THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

DIAMOND EMBRYOS; FROZEN GASES; GRAPHITIC CARBON (GC) TARGET; PULSED LASER DEPOSITION;

DEPOSITION;

EID: 17344394649 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(97)00704-6 Document Type: Article

Times cited : (8)

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