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Volumn 35, Issue 6 SUPPL. A, 1996, Pages 3537-3541
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MgO(200) highly oriented films on Si(100) synthesized by ambient-controlled pulsed KrF excimer laser deposition method
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Author keywords
KrF eximer laser; Laser ablation; MgO thin film; PLD; Pulsed laser deposition
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Indexed keywords
CRYSTAL ORIENTATION;
DEPOSITION;
EXCIMER LASERS;
FILM GROWTH;
LASER ABLATION;
MAGNESIA;
PULSED LASER APPLICATIONS;
SEMICONDUCTING SILICON;
SYNTHESIS (CHEMICAL);
X RAY CRYSTALLOGRAPHY;
LASER IRRADIATION ENERGY DENSITY;
MAGNESIUM METAL TARGET;
PULSED LASER DEPOSITION;
SCHULZ REFLECTION ATTACHMENT;
SEMICONDUCTING FILMS;
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EID: 0030170279
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.35.3537 Document Type: Article |
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Times cited : (31)
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References (15)
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