A Green's tensor approach to the modeling of nanostructure replication and characterization

Radio Science

Volumn 38, Issue 2, 2003, Pages

  Paulus, Michael ^a   Martin, Olivier J F ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Integrated optics; Light propagation; Optical lithography; Scattering calculations; Stratified media; Waveguides

Indexed keywords

ELECTROMAGNETIC FIELD THEORY; GREEN'S FUNCTION; INTEGRATED OPTICS; LIGHT PROPAGATION; NANOSTRUCTURED MATERIALS; NUMERICAL METHODS; OPTICAL WAVEGUIDES; PERMITTIVITY; PHOTOLITHOGRAPHY; TENSORS; THREE DIMENSIONAL; TWO DIMENSIONAL;

GREEN TENSOR TECHNIQUE; STRATIFIED MEDIA;

LIGHT SCATTERING;

EID: 17344386346     PISSN: 00486604     EISSN: None     Source Type: Journal    
DOI: 10.1029/2001rs002563     Document Type: Article

References (20)

1. Bérenger, J.-P., Evanescent waves in PML's: Origin of the numerical reflections in wave-structure interaction problems, IEEE Trans. Antennas Propag., 47, 1497-153, 1999.
2. Chew, W. C., Waves and Fields in Inhomogeneous Media, IEEE Press, New York. 1995.
3. Cullmann, E., Excimer laser applications in contact printing, Semicond. Int., 8, 332-334, 1985.
4. Hunsperger, R. G., Integrated Optics: Theory and Technology, 3rd ed., Springer-Verlag, New York, 1991.
5. Kahl, M., and E. Voges, Analysis of plasmon resonance and surface-enhanced Raman scattering on periodic silver structures, Phys. Rev. B, 61, 14,078-14,088, 2000.
6. Kottmann, J. P., and O. J. F. Martin, Accurate solution of the volume integral equation for high permittivity scatterers, IEEE Trans. Antennas Propag., 48, 1719-1726, 2000.
7. Macleod, H. A., Thin-Film Optical Filters, 2nd ed., Adam Hilger, Bristol, UK, 1986.
8. Martin O. J. F., and N. B. Piller, Electromagnetic scattering in polarizable backgrounds. Phys. Rev. E. 58, 3909-3915, 1998.
9. März, R., Integrated Optics Design and Modeling, Artech House, Norwell, Mass., 1994.
10. Optical Society of America, Handbook of Optics, vol. II, 2nd ed., McGraw-Hill, New York, 1995.
11. Orobtchouk, R., A. Layadi, H. Gualous, D. Pascal, A. Koster, and S. Laval, High-efficiency light coupling in a submicrometric silicon-on-insulator waveguide. Appl. Opt., 39, 5773-5777, 2000.
12. Paulus, M., and O. J. F. Martin, Light propagation and scattering in stratified media: A Green's tensor approach, J. Opt. Soc. Am. A, 18, 854-861, 2001a.
13. Paulus, M., and O. J. F. Martin, Green's tensor technique for scattering in two-dimensional stratified media, Phys. Rev. E, 63, doe:10.1103/PhysRevE.63.066615, 2001b.
14. Paulus, M., P. Gay-Balmaz, and O. J. F. Martin, Accurate and efficient computation of the Green's tensor for stratified media, Phys. Rev. E, 62, 5797-5807, 2000.
15. Schmid, H., H. Biebuyck, B. Michel, and O. J. F. Martin, Light-coupling masks for lensless, sub-wavelength optical lithography, Appl. Phys. Lett., 72, 2379-2381, 1998a.
16. Schmid, H., H. Biebuyck, B. Michel, O. J. F. Martin, and N. B. Piller, Light-coupling masks: An alternative, lensless approach to high-resolution optical contact lithography, J. Vac. Sci. Technol. B, 16, 3422-3425, 1998b.
17. Schnabel, B., E. B. Kley, and F. Wyrowski, Study on polarizing visible light by subwavelength-period metal-stripe gratings, Opt. Eng., 38, 220-226, 1999.
18. Semiconductor Industry Association, International Technology Roadmap for Semiconductory: 2001 Edition, Semicond. Ind. Assoc., San Jose, Calif., 2001. (Available at http://public.itrs.net.).
19. Sung, L. P., G. W. Mulholland, and T. A. Germer, Polarized light-scattering measurements of dielectric spheres upon a silicon surface, Opt. Lett., 24, 866-868, 1999.
20. Tai, C.-T., Dyadic Green Function in Electromagnetic Theory, IEEE Press, New York, 1994.