Low temperature study of loss mechanisms of mechanical oscillators

Physica B: Condensed Matter

Volumn 316-317, Issue , 2002, Pages 393-396

  Liu, Xiao ^a   Vignola, J F ^a   Photiadis, D M ^b   Sarkissian, A ^b   Houston, B H ^b   Merithew, R D ^c   Pohl, R O ^c  

^a SFA INC   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

^c School of Chemical and Molecular Engineering   (United States)

Author keywords

Mechanical oscillator; Micro electromechanical system; Quality factor

Indexed keywords

DAMPING; ENERGY DISSIPATION; FINITE ELEMENT METHOD; LOW TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; Q FACTOR MEASUREMENT; SILICON WAFERS; THERMOELASTICITY; VIBRATIONS (MECHANICAL);

MICRO-ELECTROMECHANICAL SYSTEMS (MEMS);

OSCILLATORS (MECHANICAL);

EID: 17344385091     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(02)00523-9     Document Type: Conference Paper

References (16)