메뉴 건너뛰기




Volumn 455-456, Issue , 2004, Pages 248-255

Optical properties of bulk c-ZrO2, c-MgO and a-As 2S3 determined by variable angle spectroscopic ellipsometry

Author keywords

A As2S3; Arsenic sulfide; C MgO; C ZrO 2; Cubic zirconia; Dielectric function; Magnesium oxide; Refractive index; Spectroscopic ellipsometry

Indexed keywords

AMORPHOUS MATERIALS; DIELECTRIC PROPERTIES; ELLIPSOMETRY; INFRARED RADIATION; MAGNESIA; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS;

EID: 17144456442     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.02.028     Document Type: Conference Paper
Times cited : (85)

References (14)
  • 4
    • 84982143545 scopus 로고    scopus 로고
    • Overview of variable angle spectroscopic ellipsometry (VASE), Part I: Basic theory and typical applications
    • Johs B., Woollam J.A., Herzinger C.M., Hilfiker J., Synowicki R., Bungay C.L. Overview of variable angle spectroscopic ellipsometry (VASE), Part I: basic theory and typical applications. SPIE. CR72:1999;1-29.
    • (1999) SPIE , vol.CR72 , pp. 1-29
    • Johs, B.1    Woollam, J.A.2    Herzinger, C.M.3    Hilfiker, J.4    Synowicki, R.5    Bungay, C.L.6
  • 5
    • 0002933681 scopus 로고    scopus 로고
    • Overview of variable angle spectroscopic ellipsometry (VASE), Part II: Advanced applications
    • Johs B., Woollam J.A., Herzinger C.M., Hilfiker J., Synowicki R., Bungay C.L. Overview of variable angle spectroscopic ellipsometry (VASE), Part II: advanced applications. SPIE. CR72:1999;30-56.
    • (1999) SPIE , vol.CR72 , pp. 30-56
    • Johs, B.1    Woollam, J.A.2    Herzinger, C.M.3    Hilfiker, J.4    Synowicki, R.5    Bungay, C.L.6
  • 6
    • 0037102902 scopus 로고    scopus 로고
    • Progress in the room-temperature optical functions of semiconductors
    • Djurisic A.B., Chan Y., Herbert Li E. Progress in the room-temperature optical functions of semiconductors. Mater. Sci. Eng. R. 38:2002;237-293.
    • (2002) Mater. Sci. Eng. R , vol.38 , pp. 237-293
    • Djurisic, A.B.1    Chan, Y.2    Herbert Li, E.3
  • 7
    • 0001524926 scopus 로고    scopus 로고
    • Parameterization of the optical functions of amorphous materials in the interband region
    • Erratum, Appl. Phys. Lett. 69, 2137 (1996)
    • Jellison G.E. Jr, Modine F.A. Parameterization of the optical functions of amorphous materials in the interband region. Appl. Phys. Lett. 69:1996;371. Erratum, Appl. Phys. Lett. 69, 2137 (1996).
    • (1996) Appl. Phys. Lett. , vol.69 , pp. 371
    • Jellison Jr., G.E.1    Modine, F.A.2
  • 8
    • 0031998601 scopus 로고    scopus 로고
    • Spectroscopic ellipsometry data analysis: Measured versus calculated quantities
    • Jellison G.E. Jr. Spectroscopic ellipsometry data analysis: measured versus calculated quantities. Thin Solid Films. 313-314:1998;33-39.
    • (1998) Thin Solid Films , vol.313-314 , pp. 33-39
    • Jellison Jr., G.E.1
  • 9
    • 0032000203 scopus 로고    scopus 로고
    • Spectroscopic ellipsometry characterization of thin-film silicon nitride
    • Jellison G.E. Jr, Modine F.A., Doshi P., Rothagi A. Spectroscopic ellipsometry characterization of thin-film silicon nitride. Thin Solid Films. 313-314:1998;193-197.
    • (1998) Thin Solid Films , vol.313-314 , pp. 193-197
    • Jellison Jr., G.E.1    Modine, F.A.2    Doshi, P.3    Rothagi, A.4
  • 13
    • 35949035159 scopus 로고
    • Investigation of effective medium models of microscopic surface roughness by spectroscopic ellipsometry
    • Aspnes D.E., Theeten J.B., Hottier F. Investigation of effective medium models of microscopic surface roughness by spectroscopic ellipsometry. Phys. Rev. B. 20:(8):1979;3292-3302.
    • (1979) Phys. Rev. B , vol.20 , Issue.8 , pp. 3292-3302
    • Aspnes, D.E.1    Theeten, J.B.2    Hottier, F.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.