CoAl ohmic contact materials with improved surface morphology for p-type 4H-SiC

Materials Science Forum

Volumn 389-393, Issue , 2002, Pages 885-888

  Nakatsuka, Osamu ^a,b   Koide, Yasuo ^a   Murakami, Masanori ^a  

^a KYOTO UNIVERSITY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Aluminum; Cobalt; Contact resistivity; Ohmic contacts; SiC

Indexed keywords

ALUMINUM; ANNEALING; BINARY ALLOYS; COAL; COBALT; ELECTRIC CONTACTORS; OHMIC CONTACTS; SILICON CARBIDE; SURFACE MORPHOLOGY; TITANIUM ALLOYS; COBALT COMPOUNDS; ELECTRIC CONDUCTIVITY; ELECTRIC PROPERTIES; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY;

CONTACT MATERIAL; CONTACT RESISTIVITIES; MODULATION STRUCTURE; OHMIC CHARACTERISTICS; P-TYPE 4H-SIC; SPECIFIC CONTACT RESISTIVITY; CONTACT RESISTIVITY;

MORPHOLOGY; SILICON CARBIDE;

EID: 17144447100     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.389-393.885     Document Type: Conference Paper

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