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Volumn 536, Issue 1-2, 2005, Pages 295-299
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Microwave-assisted volatilization of silicon fluorides for the determination of trace impurities in high purity silicon powder and quartz by ICP-MS
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Author keywords
Dynamic reaction cell inductively coupled plasma mass spectrometry; High purity silicon powder and quartz; Microwave assisted volatilization and dissolution system
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Indexed keywords
HYDROGEN INORGANIC COMPOUNDS;
IMPURITIES;
INDUCTIVELY COUPLED PLASMA;
MASS SPECTROMETRY;
MICROWAVES;
POWDERS;
PURIFICATION;
QUARTZ;
VAPORIZATION;
MATRIX VOLATILIZATION;
PLASMA MASS SPECTROMETERS;
SILICON FLUORIDES;
SILICON POWDERS;
SILICON COMPOUNDS;
ACID;
AMMONIA;
ARGON;
BARIUM;
CADMIUM;
CHROMIUM;
COBALT;
COPPER;
FLUORIDE;
IRON;
LEAD;
MAGNESIUM;
MANGANESE;
NICKEL;
NITRIC ACID;
POTASSIUM;
SILICON;
SILICON DIOXIDE;
SILVER;
TRACE ELEMENT;
ZINC;
ANALYTIC METHOD;
ARTICLE;
CONTAINER;
EXPERIMENT;
GAS;
MASS SPECTROMETER;
MASS SPECTROMETRY;
MEASUREMENT;
MICROWAVE RADIATION;
POWDER;
PRIORITY JOURNAL;
SAMPLE;
VAPOR;
VOLATILIZATION;
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EID: 17144399885
PISSN: 00032670
EISSN: None
Source Type: Journal
DOI: 10.1016/j.aca.2004.12.040 Document Type: Article |
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Times cited : (11)
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References (13)
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