|
Volumn 103-104, Issue , 1998, Pages 185-190
|
Current status of commercial ion implantation in Spain
|
Author keywords
Applications; Commercial ion implantation
|
Indexed keywords
COMPUTER CONTROL;
DIES;
ION BEAMS;
PHASE TRANSITIONS;
PLASTICS;
SURFACE TREATMENT;
CHEMICAL PROCESSES;
PHYSICAL VAPOR DEPOSITION;
THERMOCHEMICAL PROCESSES;
ION IMPLANTATION;
|
EID: 17044450256
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(98)00391-0 Document Type: Article |
Times cited : (9)
|
References (12)
|