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Volumn 84, Issue 1-3, 1996, Pages 567-573
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Implementation of ion implantation in European industry
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Author keywords
Commercialization; Industry; Ion implantation; Tools
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Indexed keywords
ECONOMICS;
INDUSTRIAL APPLICATIONS;
MARKETING;
RESEARCH LABORATORIES;
SURFACE TREATMENT;
TOOLS;
TRIBOLOGY;
COMMERCIALIZATION;
DENMARK;
ION IMPLANTER;
ION IMPLANTATION;
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EID: 0030270904
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(95)02821-8 Document Type: Article |
Times cited : (26)
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References (12)
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