Barometer of plasma- and ion-assisted methods of surface modification

Surface and Coatings Technology

Volumn 84, Issue 1 -3 pt 2, 1996, Pages 600-604

  Hirvonen, J P ^a   Koskinen, J ^a   Suni, I ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC EQUIPMENT MANUFACTURE; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; METALS; PLASMAS; PROTECTIVE COATINGS; RESEARCH; SURVEYS;

COMMERCIALIZATION; ION ASSISTED SURFACE MODIFICATION; PLASMA ASSISTED SURFACE MODIFICATION;

SURFACE TREATMENT;

EID: 0030269550     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02847-2     Document Type: Article

References (0)