Fabrication of Pb(Zr,Ti)O3 thin films by liquid delivery MOCVD using a cocktail source with Pb(METHD)2, Zr(METHD)4 and Ti(MPD)(METHD)2

Integrated Ferroelectrics

Volumn 51, Issue , 2003, Pages 63-72

  Otani, Yohei ^a   Abe, Norikazu ^a   Ueda, Yoshiki ^a   Miyake, Masato ^a   Okamura, Soichiro ^a   Shiosaki, Tadashi ^a  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Cocktail source; Liquid delivery; MOCVD; PbPtx; PZT thin films

Indexed keywords

DECOMPOSITION; ELECTRODES; FERROELECTRIC MATERIALS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PEROVSKITE;

COCKTAIL SOURCE; LIQUID DELIVERY; PBPTX; PZT THIN FILMS;

THIN FILMS;

EID: 17044424798     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580390229824     Document Type: Article

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