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Volumn 126, Issue 4, 2004, Pages 800-810
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New adaptive mode of operation for MEMS gyroscopes
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Author keywords
[No Author keywords available]
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Indexed keywords
FABRICATION DEFECTS;
FRICTION FORCES;
PARASITIC EFFECTS;
SPRING CONSTANTS;
BANDWIDTH;
COMPUTER SIMULATION;
DAMPING;
DEFECTS;
ELECTRIC POTENTIAL;
FRICTION;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
OPERATIONS RESEARCH;
ROBUSTNESS (CONTROL SYSTEMS);
VECTORS;
GYROSCOPES;
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EID: 17044391497
PISSN: 00220434
EISSN: None
Source Type: Journal
DOI: 10.1115/1.1849252 Document Type: Article |
Times cited : (56)
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References (14)
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