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Volumn 126, Issue 4, 2004, Pages 800-810

New adaptive mode of operation for MEMS gyroscopes

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION DEFECTS; FRICTION FORCES; PARASITIC EFFECTS; SPRING CONSTANTS;

EID: 17044391497     PISSN: 00220434     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1849252     Document Type: Article
Times cited : (56)

References (14)
  • 1
    • 0032138896 scopus 로고    scopus 로고
    • Micromachined inertial sensors
    • Yazdi, N., Ayazi, F., and Najafi, K., 1998, "Micromachined Inertial Sensors," Proc. IEEE, 86(8), pp. 1640-1659.
    • (1998) Proc. IEEE , vol.86 , Issue.8 , pp. 1640-1659
    • Yazdi, N.1    Ayazi, F.2    Najafi, K.3
  • 2
    • 0002122966 scopus 로고    scopus 로고
    • Modeling and simulation of micromachined gyroscopes in the presence of imperfection
    • Puerto Rico, USA
    • Shkel, A., Howe, R. T., and Horowitz, R., 1999, "Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfection," Int. Conf. On Modelling and Simulation of Microsystem, Puerto Rico, USA, pp. 605-608.
    • (1999) Int. Conf. on Modelling and Simulation of Microsystem , pp. 605-608
    • Shkel, A.1    Howe, R.T.2    Horowitz, R.3
  • 6
    • 0032155990 scopus 로고    scopus 로고
    • Modification of piezoelectric vibratory gyroscope resonator parameters by feedback control
    • Loveday, P. W., and Rogers, C. A., 1998, "Modification of Piezoelectric Vibratory Gyroscope Resonator Parameters by Feedback Control," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 45(5), pp. 1211-1215.
    • (1998) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.45 , Issue.5 , pp. 1211-1215
    • Loveday, P.W.1    Rogers, C.A.2
  • 8
    • 0033697639 scopus 로고    scopus 로고
    • A monolithic surface micromachined Z-axis gyroscope with digital output
    • Honolulu, HI, USA
    • Jiang, X., Seeger, J., Kraft, M., and Boser, B. E., 2000, "A Monolithic Surface Micromachined Z-Axis Gyroscope With Digital Output," 2000 Symposium on VLSI Circuits, Honolulu, HI, USA, pp. 16-19.
    • (2000) 2000 Symposium on VLSI Circuits , pp. 16-19
    • Jiang, X.1    Seeger, J.2    Kraft, M.3    Boser, B.E.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.