Optimization of design and fabrication for micromachined true time delay (TTD) phase shifters

Sensors and Actuators, A: Physical

Volumn 119, Issue 2, 2005, Pages 446-454

  Palei, W ^a   Liu, A Q ^a   Yu, A B ^a   Alphones, Arokiaswami ^a   Lee, Y H ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Capacitive shunt switch; Distributed MEMS transmission line (DMTL); MEMS; Radio frequency (RF); True time delay (TTD) phase shifter

Indexed keywords

CAPACITANCE; DELAY CIRCUITS; DESIGN; ELECTRIC IMPEDANCE; INTEGRATED CIRCUITS; KURCHATOVIUM; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROWAVES; OPTIMIZATION; SILICON WAFERS; WAVEGUIDES;

CAPACITANCE SHUNT SWITCH; DISTRIBUTED MEMS TRANSMISSION LINE (DMTL); MEMS; RADIO FREQUENCY (RF); TRUE TIME DELAY (TTD) PHASE SHIFTERS;

PHASE SHIFTERS;

EID: 17044377158     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.10.006     Document Type: Article

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