The effect of sheath on plasma momentum transport to an electrically biased surface

International Journal of Heat and Mass Transfer

Volumn 48, Issue 11, 2005, Pages 2198-2208

  Yeh, F B ^a   Wei, P S ^b  

^a Chinese Naval Academy Kaohsiung   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

Kinetic ion and electron momentum fluxes; Momentum flux on a negative electrically biased surface; Plasma momentum flux; Presheath; Sheath

Indexed keywords

CURRENT DENSITY; ELECTRON TRANSPORT PROPERTIES; ION SOURCES; MICROELECTROMECHANICAL DEVICES; PLASMA ETCHING; SPRAYING; SURFACE PHENOMENA; TEMPERATURE DISTRIBUTION; VAPOR DEPOSITION;

CHARGE NUMBER; ELECTRON MOMENTUM FLUXES; ION MOMENTUM FLUXES; MOMENTUM TRANSFER; SPRAY DEPOSITION;

PLASMA APPLICATIONS;

HEAT FLUX;

EID: 17044362267     PISSN: 00179310     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijheatmasstransfer.2004.12.029     Document Type: Article

References (21)

1. F.F. Chen Introduction to plasma physics 1974 Plenum Press New York
2. D. Bohm Minimum ionic kinetic energy for a stable sheath A. Guthrie R. Wakerling The characteristics of electrical discharges in magnetic fields 1949 McGraw-Hill New York 77 86
3. K. Shirai, and S. Gonda Study of the substrate bias in plasma depositions using an electron cyclotron resonance plasma J. Appl. Phys. 68 1990 4258 4267
4. F. Thièry, Y. Pauleau, and L. Ortega Effect of the substrate bias voltage on the physical characteristics of cooper films deposited by microwave plasma-assisted sputtering technique J. Vac. Sci. Technol. A 22 2004 30 35
5. F.B. Yeh, and P.S. Wei Plasma energy transport to an electrically biased surface Int. J. Heat Mass Transfer 47 2004 4019 4029
6. N.B. Morley, A.A. Gaizer, and M.A. Abdou Estimates of the effect of a plasma momentum flux on the free surface of a thin film of liquid metal Fus. Eng. Des. 28 1995 176 180
7. D.J. Albares Electron and ion momentum transfer from plasma electrical conductivity in a magnetic field Phys. Fluid 16 1973 1252 1259
8. K. Kuriki, and Y. Kitora Momentum transfer to target from laser-produced plasma Appl. Phys. Lett. 30 1977 443 446
9. D.W. Koopman Momentum transfer interaction of a laser-produced plasma with a low-pressure background Phys. Fluids 15 1972 1959 1969
10. A.D. Glew, R. Saha, J.S. Kim, and M.A. Cappelli Ion energy and momentum flux dependence of diamond-like carbon film synthesis in radio frequency discharges Surf. Coatings Technol. 114 1999 224 229
11. S.A. Cohen, F. Zonca, J. Timberlake, T. Bennett, J. Cuthbertson, W. Langer, and R. Motley An instrument for measuring the momentum flux from atomic and charged particle jets Rev. Sci. Instrum. 61 1990 3586 3591
12. F. Zonca, S.A. Cohen, J. Cuthbertson, J. Timberlake, and D. Ruzic Measurements of plasma flows in a divertor simulation J. Nucl. Mater. 176 & 177 1990 746 749
13. D.G. Chavers, and F.R. Chang-Díaz Momentum flux measuring instrument for neutral and charged particle flows Rev. Sci. Instrum. 73 2002 3500 3507
14. G.A. Emmert, R.M. Wieland, A.T. Mense, and J.N. Davidson Electric sheath and presheath in a collisionless, finite ion temperature plasma Phys. Fluids 23 1980 803 812
15. P.S. Wei, F.B. Yeh, and C.Y. Ho Distribution function of positive ions and electrons in a plasma near a surface IEEE Trans. Plasma Sci. 28 2000 1244 1253
16. P.S. Wei, and F.B. Yeh Fluid-like transport variables in a kinetic, collisionless plasma near a surface with ion and electron reflection IEEE Trans. Plasma Sci. 28 2000 1233 1243
17. B. Chapman Glow discharge processes, sputtering and plasma etching 1980 Wiley New York
18. G. Bachet, L. Chérigier, and F. Doveil Ion velocity distribution function observations in a multipolar argon discharge Phys. Plasmas 2 1995 1782 1788
19. M.J. Goeckner, J. Goree, and T.E. Sheridan Measurements of ion velocity and density in the plasma sheath Phys. Fluids B 4 1992 1663 1670
20. P.C. Stangeby The plasma sheath D.E. Post R. Behrisch Physics of plasma wall interactions in controlled fusion Proceedings of NATO Advanced Study Institute, July 30-August 10, 1984, Val-Morin, Quebec, Canada 1986 Plenum New York 41 97
21. W.G. Vincenti, and C.H. Kruger Jr. Introduction to physical gas dynamics 1970 Wiley New York