Distribution functions of positive ions and electrons in a plasma near a surface

IEEE Transactions on Plasma Science

Volumn 28, Issue 4, 2000, Pages 1244-1253

  Wei, Peng Sheng ^a,c   Yeh, Feng Bin ^a,b   Ho, Ching Yen ^a,b  

^a IEEE   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^c HWA HSIA INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ION REFLECTION; MAXWELL-BOLTZMANN DISTRIBUTIONS; PLASMA MATERIALS PROCESSING; PLASMA WALL INTERACTIONS;

ELECTRIC SPACE CHARGE; ELECTRON REFLECTION; HEAT TRANSFER; KINETIC THEORY; MATHEMATICAL MODELS; PLASMA INTERACTIONS; PLASMA SHEATHS; POSITIVE IONS; PROBABILITY DISTRIBUTIONS; VELOCITY;

PLASMA COLLISION PROCESSES;

EID: 0034239950     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.893313     Document Type: Article

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