Characterization of diamond-like carbon thin films prepared by a microwave plasma enhanced chemical vapor deposition method

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 254-258

  Choi, Won Seok ^a   Chung, Ilsub ^a   Lee, Young Ze ^a   Hong, Byungyou ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Atomic force microscopy (AFM); Raman spectroscopy; Thin film

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; FILM GROWTH; HARDNESS; MICROWAVES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY;

FRICTION FORCE MICROSCOPES (FFM); PIN-ON DISK (POD) MEASUREMENTS;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON;

EID: 16744362098     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.033     Document Type: Article

References (10)

1. Suzuki J.-I. Okada S. Jpn. J. Appl. Phys. 34 9B 1995 L1218
2. Savvides N. J. Appl. Phys. 59 1986 4133
3. Lu Y.F. Huang S.M. Huan C.H.A. Luo X.F. Appl. Phys. A 68 1999 647
4. Tamor M.A. Wu C.H. Carter R.O. Lindsay N.E. Appl. Phys. Lett. 55 1989 1388
5. Chung J.-W. Lee C.-S. Ko D.-H. Han J.H. Eun K. Y. Lee K.-R. Diamond Relat. Mater. 10 2001 2069
6. Chan W.-C. Zhou B. Chung Y.-W. Lee C.S. Lee S.T. J. Vac. Sci. Technol. A 16 1998 1907
7. Peng X.L. Barber Z.H. Clyne T.W. Surf. Coat. Technol. 138 2001 23
8. Zhang Q. Yoon S.F. Rusli Ahn J. Yang H. J. Appl. Phys. 84 1998 5538
9. Beeman D. Silverman J. Lynds R. Anderson M.R. Phys. Rev. B 30 1984 870
10. Ogwu A.A. Lamberton R.W. Morley S. Maguire P. McLaughlin J. Physica B 269 1999 335