Influence of nucleation on hydrogen incorporation in CVD diamond films

Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 527-531

  Tang, C J ^a   Neves, A J ^a   Fernandes, A J S ^a  

^a UNIVERSITY OF AVEIRO   (Portugal)

Author keywords

CVD diamond; FTIR; Hydrogen; Nucleation

Indexed keywords

FILM GROWTH; HYDROGEN; INFRARED SPECTROSCOPY; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS;

MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (MPCVD);

DIAMOND FILMS;

DIAMOND COATING;

EID: 0036508387     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00667-7     Document Type: Article

References (14)