Selective growth of ZnO nanodots prepared by metalorganic chemical vapor deposition on focused-ion beam-nanopatterned substrates

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 21, Issue 2-4, 2004, Pages 601-605

  Kim, Sang Woo ^a   Kotani, Teruhisa ^a   Ueda, Masaya ^a   Fujita, Shizuo ^a   Fujita, Shigeo ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

FIB; MOCVD; Nanodots; ZnO

Indexed keywords

ENERGY DISPERSIVE SPECTROSCOPY; EVAPORATION; GROWTH (MATERIALS); ION BEAMS; ION IMPLANTATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NANOSTRUCTURED MATERIALS; PRECIPITATION (CHEMICAL); SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS; SPUTTERING; SURFACE ACTIVE AGENTS; SYNTHESIS (CHEMICAL);

FOCUSED ION BEAMS (FIB); NANODOTS;

ZINC OXIDE;

EID: 1642524922     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2003.11.087     Document Type: Conference Paper

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