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Volumn 762, Issue , 2003, Pages 735-740
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Improved electrical properties in nanocrystalline Si formed by metal induced growth
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CURRENT DENSITY;
DOPING (ADDITIVES);
ELECTRIC PROPERTIES;
EPITAXIAL GROWTH;
GRAIN BOUNDARIES;
LEAKAGE CURRENTS;
MAGNETRON SPUTTERING;
PASSIVATION;
PHOTODIODES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SECONDARY ION MASS SPECTROMETRY;
SILICON;
SINGLE CRYSTALS;
SOLAR CELLS;
THIN FILMS;
METAL INDUCED GROWTH (MIG);
SURFACE POLISHING;
THERMAL ENERGY;
NANOSTRUCTURED MATERIALS;
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EID: 1642459327
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-762-a17.11 Document Type: Conference Paper |
Times cited : (3)
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References (7)
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