MBE growth of AlGaAs on patterned GaAs substrates

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 21, Issue 2-4, 2004, Pages 573-577

  Limmer, W ^a   Bitzer, K ^a   Sauer, R ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

AlGaAs; Growth model; Micro photoluminescence; Patterned substrate

Indexed keywords

COMPUTER SIMULATION; CRYOSTATS; EPITAXIAL GROWTH; ETCHING; MOLECULAR BEAM EPITAXY; MORPHOLOGY; PHOTOLITHOGRAPHY; PHOTOLUMINESCENCE; SCANNING ELECTRON MICROSCOPY;

ALGAAS; GROWTH MODEL; MICRO-PHOTOLUMINESCENCE; PATTERNED SUBSTRATES;

ALUMINUM COMPOUNDS;

EID: 1642266938     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2003.11.082     Document Type: Conference Paper

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