Transformation of axial vacuum-arc plasma flows into radial streams and their use in coating deposition

IEEE Transactions on Plasma Science

Volumn 27, Issue 4, 1999, Pages 1026-1029

  Aksenov, Ivan I ^a  

^a KHARKOV INSTITUTE OF PHYSICS AND TECHNOLOGY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ANODES; CATHODES; COATINGS; CURRENT DENSITY; ELECTRIC ARCS; ION IMPLANTATION; MAGNETIC FIELD EFFECTS; PLASMA DENSITY; PLASMA SOURCES; TITANIUM; VACUUM APPLICATIONS;

AXIAL MAGNETIC FOCUSING COIL; CURVILINEAR FILTER; MAGNETIC FIELD STRENGTH; RADIAL STREAMS; VACUUM ARC PLASMA SOURCES;

PLASMA FLOW;

EID: 0033344973     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.782275     Document Type: Article

References (5)

1. S. Anders, A. Anders, M. Dickinson, R. MacGill, and I. Brown, "S-shaped magnetic macroparticle filter for cathodic arc deposition," in Proc. XVII Int. Symp. Discharge Electr. Insulation Vacuum, Berkeley, ÇA, 1996, p. 904.
2. T. Schulke, A. Anders, and P. Siemroth, "Macroparticle filtering of highcurrent vacuum arc plasmas," Proc. XVII Int. Symp. Discharge Electr. Insulation Vacuum, Berkeley, CA, 1996, p. 914.
3. I. I. Aksenov, V. A. Belous, V. G. Padalka, and V. M. Khoroshikh, "Device for macroparticle filtering of vacuum arc plasma" (in Russian), Pribory i Tekhnika Ehksperimenta N5 (1978) 236.
4. I. I. Aksenov, S. I. Vakula, V. G. Padalka, V. E. Strel'nitskii, and V. M. Khoroshikh, "A highly-efficient source of pure carbon plasma," Sov. Phys. Tech. Phys., vol. 25, p. 1164, 1980.
5. I. I. Aksenov, V. A. Belous, and V. M. Khoroshikh, "Formation of filtered intense vacuum-arc plasma flows," in Proc. XVIIth ISDEIV, Berkeley, CA, 1996, p. 895.