A compact chemical-resistant microvalve array using parylene membrane and pneumatic actuation

Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004

Volumn , Issue , 2004, Pages 72-76

  Hua, Zhishan ^a   Srivannavit, Onnop ^a   Xia, Yongmei ^a   Gulari, Erdogan ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL RESISTANCE; ELASTOMERS; ETCHING; FLUIDICS; MICROMACHINING; ORGANIC SOLVENTS; PNEUMATIC EQUIPMENT; SILICONES;

LAB-ON-A-CHIP SYSTEMS; PARYLENE MEMBRANES; PNEUMATIC MICROVALVE ARRAY; SEALING PRESSURE;

VALVES (MECHANICAL);

EID: 16244413960     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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2. W. Grover, A. Skelley, C. Liu, E. Lagally, R. Mathies, "Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices", Sensors and Actuators B, 2003, 89, 315-323.
3. M. Unger, H. Chou, T. Thorsen, A. Scherer, S. Quake, "Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography", Science, 2000, 288, 113-116.
4. J. Lee, C. Park, and G. Whitesides, "Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic devices", Anal. Chem., 2003, 75, 6544-6554
5. J. Xie, X. Yang, X. Q. Wang and T. C. Tai, "Surface Micromachined Leakage Proof Parylene Check Valve", MEMS 2001, Interlaken, Switzerland, 2001, pp.539-542.
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7. Hanseup S. Kim and Khalil. Najafi, "Wafter Bonding Using Parylene and Wafer-Level Transfer of Free-standing Parylene Membranes", Transducers' 2003.