Subsurface miscibility of metal overlayers with V, Nb and Ta substrates

Surface Science

Volumn 580, Issue 1-3, 2005, Pages 173-194

  Huger E ^a   Wormeester, H ^b   Osuch, K ^c,d  

^a CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c UNIVERSITY OF SOUTH AFRICA   (South Africa)

^d WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Epitaxial growth; Subsurface alloying; Surface contamination

Indexed keywords

ANNEALING; DEPOSITION; DIFFUSION; EPITAXIAL GROWTH; NIOBIUM; SOLUBILITY; TANTALUM; TRANSITION METALS; VANADIUM;

METAL OVERLAYERS; SUBSURFACE ALLOYING; SUBSURFACE MISCIBILITY; SURFACE CONTAMINATION;

SURFACE CHEMISTRY;

EID: 15944369574     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2005.01.055     Document Type: Article

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