Design and fabrication of the diffractive X-ray optics at BESSY

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5539, Issue , 2004, Pages 160-165

  Firsov, Alexandre ^a   Erko, Alexei ^a   Svintsov, Alexandre ^b  

^a HAHN MEITNER INSTITUT   (Germany)

^b INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

Microfabrication; Synchrotron radiation; X ray optics

Indexed keywords

DIFFRACTIVE OPTICS; ELECTRON BEAM LITHOGRAPHY; FOCUSING; HOLOGRAPHY; LENSES; LIGHT REFLECTION; LIGHT TRANSMISSION; MIRRORS; MONOCHROMATORS; SYNCHROTRON RADIATION; X RAY SCATTERING;

ENERGY DISPERSION; MICROFABRICATION; REFLECTION ZONES; X RAY DIFFRACTION FOCUSING ELEMENTS;

X RAY OPTICS;

EID: 15844410549     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.557865     Document Type: Conference Paper

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