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Volumn 18, Issue 12, 2004, Pages 2294-2302

Experimental study on spray etching process in micro fabrication of lead frame

Author keywords

Etching Factor; Impact Force; Lead Frame; Spray Characteristics; Wet Etching

Indexed keywords

DOPPLER EFFECT; KINEMATICS; NOZZLES; PRECISION ENGINEERING; SPRAYING; SURFACE MOUNT TECHNOLOGY;

EID: 15844382757     PISSN: 12264865     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02990234     Document Type: Article
Times cited : (11)

References (11)
  • 1
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  • 3
    • 85072468468 scopus 로고    scopus 로고
    • A study on the effects of fuel viscosity and nozzle geometry on high injection pressure diesel spray characteristics
    • Chang, C. T. and Farrell, P. V., 1997, "A Study on the Effects of Fuel Viscosity and Nozzle Geometry on High Injection Pressure Diesel Spray Characteristics," SAE Paper 970353, pp. 235 -244.
    • (1997) SAE Paper 970353 , pp. 235-244
    • Chang, C.T.1    Farrell, P.V.2
  • 4
    • 8344245641 scopus 로고    scopus 로고
    • Characteristics of spray from pressure-swirl nozzle with different liquid properties and nozzle geometries
    • Choi, Y. C., Jung, J. W. and Kim, D. J., 2001, "Characteristics of Spray from Pressure-Swirl Nozzle with Different Liquid Properties and Nozzle Geometries," Trans. of KSME (B), Vol. 25, No. 12, pp. 1813-1820.
    • (2001) Trans. of KSME (B) , vol.25 , Issue.12 , pp. 1813-1820
    • Choi, Y.C.1    Jung, J.W.2    Kim, D.J.3
  • 5
    • 0037683094 scopus 로고    scopus 로고
    • Selective wet etching of microcontact. Printed cu substrates with control over the etch profile
    • Geissler, M., Schmid, H., Michel, B. and Delamarche, E., 2003, "Selective Wet Etching of Microcontact. Printed Cu Substrates with Control over the Etch Profile," Microelectronic Engineering, Vol. 67, pp. 326-332.
    • (2003) Microelectronic Engineering , vol.67 , pp. 326-332
    • Geissler, M.1    Schmid, H.2    Michel, B.3    Delamarche, E.4
  • 6
    • 15844402651 scopus 로고    scopus 로고
    • A study on effect of spray characteristics on etching characteristics in micro fabrication system
    • Jung, J.W. and Kim, D. J., 2004, "A Study on Effect of Spray Characteristics on Etching Characteristics in Micro Fabrication System," Trans. of KSME (B), Vol. 28, No. 1, pp. 109-117.
    • (2004) Trans. of KSME (B) , vol.28 , Issue.1 , pp. 109-117
    • Jung, J.W.1    Kim, D.J.2
  • 7
    • 15844426107 scopus 로고    scopus 로고
    • Correlation between spray characteristics and etching characteristics in twin spray
    • Jung, J. W., Kim, Y. J. and Kim, D. J., 2004, "Correlation Between Spray Characteristics and Etching Characteristics in Twin Spray," Trans. of KSME (B), Vol. 28, No. 4, pp. 449-455.
    • (2004) Trans. of KSME (B) , vol.28 , Issue.4 , pp. 449-455
    • Jung, J.W.1    Kim, Y.J.2    Kim, D.J.3
  • 8
    • 0033233002 scopus 로고    scopus 로고
    • Drop-size/velocity correlations at formation of sprays from fan nozzles
    • Sdiahmed, M. M., Brown, R. B. and Darvishvand, M., 1999, "Drop-Size/Velocity Correlations at Formation of Sprays from Fan Nozzles," Transactions of the ASAE, Vol. 42(6), pp. 1557-1564.
    • (1999) Transactions of the ASAE , vol.42 , Issue.6 , pp. 1557-1564
    • Sdiahmed, M.M.1    Brown, R.B.2    Darvishvand, M.3
  • 9
    • 0141531090 scopus 로고    scopus 로고
    • Wet etching studies of silicon nitride thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition
    • Sundaram, K. B., Sah, R. E., Baumann, H., Balachandran, K. and Todi, R. M., 2003, "Wet etching Studies of Silicon Nitride Thin Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition," Microelectronic engineering, Vol. 70, pp. 109-114.
    • (2003) Microelectronic Engineering , vol.70 , pp. 109-114
    • Sundaram, K.B.1    Sah, R.E.2    Baumann, H.3    Balachandran, K.4    Todi, R.M.5
  • 10
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    • Principles of photoetching in the fabrication of fine-pitch lead frames
    • Ueda, R., Toki, S., Tanizaki, Y., Sugiutra T. and Asakura, S., 1994, "Principles of Photoetching in the Fabrication of Fine-Pitch Lead Frames," Metal finishing, Vol. 92, No. 1, pp. 29-31.
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  • 11
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    • Theoretical and practical aspects of the miniaturization of lead frames by double sided asymmetrical spray etching
    • Visser, A. and Buhlert, M., 2001, "Theoretical and Practical Aspects of the Miniaturization of Lead Frames by Double Sided Asymmetrical Spray Etching," Journal of Materials Processing Technology, Vol. 115, pp. 108-113.
    • (2001) Journal of Materials Processing Technology , vol.115 , pp. 108-113
    • Visser, A.1    Buhlert, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.