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Volumn 5532, Issue , 2004, Pages 1-15

Quantitative optical metrology with CMOS cameras

Author keywords

Accuracy; Digital holography; MEMS; MOEMS; NIST gauges; Optical metrology; Optoelectronic holography microscope; Precision; Sensitivity; Wafer level testing

Indexed keywords

CAMERAS; CMOS INTEGRATED CIRCUITS; GAGES; HOLOGRAPHY; LASER BEAMS; MICROELECTROMECHANICAL DEVICES; OPTICAL SENSORS; OPTOELECTRONIC DEVICES;

EID: 15744398870     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.562788     Document Type: Conference Paper
Times cited : (6)

References (27)
  • 1
    • 0033907602 scopus 로고    scopus 로고
    • Absolute shape measurements using high-resolution optoelectronic holography methods
    • C. Furlong and R. J. Pryputniewicz, "Absolute shape measurements using high-resolution optoelectronic holography methods," Opt. Eng., 39(1):216-223, 2000.
    • (2000) Opt. Eng. , vol.39 , Issue.1 , pp. 216-223
    • Furlong, C.1    Pryputniewicz, R.J.2
  • 2
    • 0036421051 scopus 로고    scopus 로고
    • Sensitivity, accuracy, and precision issues in optoelectronic holography based on fiber optics and high-spatial and high-digital resolution cameras
    • C. Furlong, J. S. Yokum, and R. J. Pryputniewicz, "Sensitivity, accuracy, and precision issues in optoelectronic holography based on fiber optics and high-spatial and high-digital resolution cameras," Proc. SPIE, 4777:77-84, 2002.
    • (2002) Proc. SPIE , vol.4777 , pp. 77-84
    • Furlong, C.1    Yokum, J.S.2    Pryputniewicz, R.J.3
  • 3
    • 0008600841 scopus 로고
    • An electro-optic holography system with real-time arithmetic processing
    • K. A. Stetson, W. R. Brohinsky, J. Wahid, and T. Bushman, "An electro-optic holography system with real-time arithmetic processing," J. Nondestruct. Eval., 8:69-75, 1989.
    • (1989) J. Nondestruct. Eval. , vol.8 , pp. 69-75
    • Stetson, K.A.1    Brohinsky, W.R.2    Wahid, J.3    Bushman, T.4
  • 4
    • 84958485869 scopus 로고
    • Measurement of vibration patterns using electro-optic holography
    • R. J. Pryputniewicz and K. A. Stetson, "Measurement of vibration patterns using electro-optic holography," Proc. SPIE, 1162:456-467, 1989.
    • (1989) Proc. SPIE , vol.1162 , pp. 456-467
    • Pryputniewicz, R.J.1    Stetson, K.A.2
  • 5
    • 0011926066 scopus 로고
    • Quantitative determination of displacements and strains from holograms
    • Ch. 3 in P. K. Rastogi, ed., Springer-Verlag, Berlin
    • R. J. Pryputniewicz, "Quantitative determination of displacements and strains from holograms," Ch. 3 in P. K. Rastogi, ed., Holographic interferometry, Springer-Verlag, Berlin, pp. 33-72, 1994.
    • (1994) Holographic Interferometry , pp. 33-72
    • Pryputniewicz, R.J.1
  • 6
    • 0002968604 scopus 로고
    • Opto-mechanical study and optimization of a cantilever plate dynamics
    • C. Furlong and R. J. Pryputniewicz, "Opto-mechanical study and optimization of a cantilever plate dynamics," Proc. SPIE, 2545:192-203, 1995.
    • (1995) Proc. SPIE , vol.2545 , pp. 192-203
    • Furlong, C.1    Pryputniewicz, R.J.2
  • 7
    • 0001673069 scopus 로고    scopus 로고
    • Hybrid computational and experimental approach for the study and optimization of mechanical components
    • C. Furlong and R. J. Pryputniewicz, "Hybrid computational and experimental approach for the study and optimization of mechanical components," Opt. Eng., 37(5): 1448-1455, 1998.
    • (1998) Opt. Eng. , vol.37 , Issue.5 , pp. 1448-1455
    • Furlong, C.1    Pryputniewicz, R.J.2
  • 8
    • 0000270342 scopus 로고    scopus 로고
    • Holographic microscope for measuring displacements of vibrating microbeams using time-average electro-optic holography
    • G. C. Brown and R. J. Pryputniewicz, "Holographic microscope for measuring displacements of vibrating microbeams using time-average electro-optic holography," Opt. Eng., 37(2): 1398-1405, 1998.
    • (1998) Opt. Eng. , vol.37 , Issue.2 , pp. 1398-1405
    • Brown, G.C.1    Pryputniewicz, R.J.2
  • 9
    • 0038380737 scopus 로고    scopus 로고
    • Optoelectronic characterization of shape and deformation of MEMS accelerometers used in transportation applications
    • C. Furlong and R. J. Pryputniewicz, "Optoelectronic characterization of shape and deformation of MEMS accelerometers used in transportation applications," Opt. Eng., 42(2):1223-1231, 2003.
    • (2003) Opt. Eng. , vol.42 , Issue.2 , pp. 1223-1231
    • Furlong, C.1    Pryputniewicz, R.J.2
  • 10
    • 15744364076 scopus 로고    scopus 로고
    • Sloan DekTak calibration standards set
    • Tucson, AZ
    • Veeco Instruments, "Sloan DekTak calibration standards set," Veeco Metrology Group, Tucson, AZ, 2002.
    • (2002) Veeco Metrology Group
  • 11
    • 0035240881 scopus 로고    scopus 로고
    • CCD vs. CMOS: Facts and fiction
    • Jan
    • D. Litwiller, "CCD vs. CMOS: facts and fiction," Photonics Spectra, pp. 154-158, Jan 2001.
    • (2001) Photonics Spectra , pp. 154-158
    • Litwiller, D.1
  • 12
    • 0038277894 scopus 로고    scopus 로고
    • Duelling detectors
    • Feb
    • J. Janesick, "Duelling detectors," OE Magazine, pp.30-33, Feb 2002.
    • (2002) OE Magazine , pp. 30-33
    • Janesick, J.1
  • 13
    • 15744390646 scopus 로고    scopus 로고
    • Waterloo, Notario, Canada
    • Dalsa, Corp., http://www.dalsa.com, Waterloo, Notario, Canada, 2004.
    • (2004)
  • 14
    • 15744398793 scopus 로고    scopus 로고
    • Costa Mesa, CA
    • Silicon Imaging, Inc., http://www.siliconimaging.com, Costa Mesa, CA, 2004.
    • (2004)
  • 15
    • 0004046277 scopus 로고    scopus 로고
    • SDRC Imageware, Ann Arbor, MI
    • Verdict user's guide v8.0, SDRC Imageware, Ann Arbor, MI, 1998.
    • (1998) Verdict User's Guide V8.0
  • 16
    • 15744395728 scopus 로고    scopus 로고
    • Innovmetric Software Inc., Sainte-Foy, Quebec, Canada
    • Polyworks user's guide v7.0, Innovmetric Software Inc., Sainte-Foy, Quebec, Canada, 2004.
    • (2004) Polyworks User's Guide V7.0
  • 17
    • 15744396682 scopus 로고    scopus 로고
    • Parametric Technology Corporation, Waltham, MA
    • Pro/Scan-Tools. User's guide v. 2000i2, Parametric Technology Corporation, Waltham, MA, 2000.
    • (2000) Pro/Scan-tools. User's Guide V. 2000i2
  • 19
    • 15744362152 scopus 로고    scopus 로고
    • Norwood, MA
    • Analog Devices, Inc., http://www.analog.com, Norwood, MA, 2004.
    • (2004)
  • 20
    • 84885255983 scopus 로고    scopus 로고
    • ADXL202 / ADXL210 - Low cost ±2 g / ±10 g dual axis iMEMS® accelerometers with digital output
    • Analog Devices, Inc., Norwood, MA
    • Application Note, "ADXL202 / ADXL210 - low cost ±2 g / ±10 g dual axis iMEMS® accelerometers with digital output", Analog Devices, Inc., Norwood, MA, 2004.
    • (2004) Application Note
  • 22
    • 15744396442 scopus 로고    scopus 로고
    • Confocal optoelectronic holography microscope for structural characterization and optimization of MEMS
    • Boston, MA
    • C. Furlong, A. M. Siegel, P. Hefti, and R. J. Pryputniewicz, "Confocal optoelectronic holography microscope for structural characterization and optimization of MEMS," Transducers'03, pp.420-423, Boston, MA, 2003.
    • (2003) Transducers'03 , pp. 420-423
    • Furlong, C.1    Siegel, A.M.2    Hefti, P.3    Pryputniewicz, R.J.4
  • 25
    • 0000981730 scopus 로고    scopus 로고
    • Improved three-dimensional imaging with a digital holography microscope with a source of partial spatial coherence
    • F. Dubois, L. Joannes, J.-C. Legros, "Improved three-dimensional imaging with a digital holography microscope with a source of partial spatial coherence", Applied Optics, 38(34):7085-7094, 1999.
    • (1999) Applied Optics , vol.38 , Issue.34 , pp. 7085-7094
    • Dubois, F.1    Joannes, L.2    Legros, J.-C.3
  • 26
    • 2142811512 scopus 로고    scopus 로고
    • Trends in 300 mm wafers: Factory automation
    • R. Hunter and C. Humphreys, "Trends in 300 mm wafers: factory automation," Semicon. Int., 26(6), pp. 60-64, 2003.
    • (2003) Semicon. Int. , vol.26 , Issue.6 , pp. 60-64
    • Hunter, R.1    Humphreys, C.2
  • 27
    • 2142660322 scopus 로고    scopus 로고
    • New optoelectronic methodology for nondestructive evaluation of MEMS at the wafer level
    • in-press
    • C. Furlong, C. F. Ferguson, and M. J. Melson, "New optoelectronic methodology for nondestructive evaluation of MEMS at the wafer level," in-press, Proc. SPIE, 5265:000-000, 2003.
    • (2003) Proc. SPIE , vol.5265
    • Furlong, C.1    Ferguson, C.F.2    Melson, M.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.