An improved illumination system for spatial coherence control

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5531, Issue , 2004, Pages 220-227

  Liu, Zhiqiang ^a   Gemma, Takeshi ^a   Rosen, Joseph ^b   Takeda, Mitsuo ^c  

^a Nikon C/O   (Japan)

^b BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

^c UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; INTERFEROMETERS; LIGHTING; MIRRORS; PROBLEM SOLVING; TOMOGRAPHY;

BROADBAND LIGHT; INTERFEROGRAMS; NOISE SPURIOUS FRINGES; SPATIAL COHERENCE CONTROL;

COHERENT LIGHT;

EID: 15744388667     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.560350     Document Type: Conference Paper

References (6)

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3. J. Rosen and M. Takeda, "Longitudinal spatial cpoherence applied for surface profilometry", Appl. Opt. Vol. 39, No.23 pp 4107-4111 (2000).
4. W. Wang, H. Kozaki, J. Rosen and M. Takeda, "Synthesis of longitudinal coherence functions by spatial modulation of an extended light source: a new interpretation and experimental verification", Appl. Opt. Vol. 41, No. 10, pp 1962-1970 (2002).
5. Z. Duan, M. Gokhler, J. Rosen, H. Kozaki, N. Ishii, and M. Takeda, "Synthesis spatial coherence function for optical tomography and profilometry: simultaneous realization of longitudinal coherence scan and phase shift", in Interferometry XI: Techniques and analysis, Proc. SPIE Vol.4777 (Seattle, USA) pp.110-177 (2002,8) (2002).
6. M. Gokhler, Z. Duan, J. Rosen, and M. Takeda, "Spatial coherence radar applied for tilted surface profilometry," Opt. Eng. 42(3), 830-836 (2003).