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Volumn 42, Issue 3, 2003, Pages 830-836

Spatial coherence radar applied for tilted surface profilometry

Author keywords

Coherence; Interferometry; Surfaces; Tomography

Indexed keywords

COHERENT LIGHT; INTERFEROMETERS; PROFILOMETRY; SPATIAL VARIABLES MEASUREMENT;

EID: 0037356389     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1542893     Document Type: Article
Times cited : (23)

References (7)
  • 1
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    • T. Dresel, G. Hausler, and H. Vezke, "Tree dimensional sensing of rough surfaces by coherence radar," Appl. Opt. 31, 919-925 (1992).
    • (1992) Appl. Opt. , vol.31 , pp. 919-925
    • Dresel, T.1    Hausler, G.2    Vezke, H.3
  • 2
    • 84903983714 scopus 로고
    • Profilometry with a coherence scanning microscope
    • B. S. Lee and T. C. Strand, "Profilometry with a coherence scanning microscope," Appl. Opt. 29, 3784-3788 (1990).
    • (1990) Appl. Opt. , vol.29 , pp. 3784-3788
    • Lee, B.S.1    Strand, T.C.2
  • 4
    • 0028543018 scopus 로고
    • Determination of the phase change on reflection from two-beam interference
    • J. E. Biegen, "Determination of the phase change on reflection from two-beam interference," Opt. Lett. 19, 1690-1692 (1994).
    • (1994) Opt. Lett. , vol.19 , pp. 1690-1692
    • Biegen, J.E.1
  • 5
    • 0041681415 scopus 로고    scopus 로고
    • Longitudinal spatial coherence applied for surface profilometry
    • J. Rosen and M. Takeda, "Longitudinal spatial coherence applied for surface profilometry," Appl. Opt. 39, 4107-4111 (2000).
    • (2000) Appl. Opt. , vol.39 , pp. 4107-4111
    • Rosen, J.1    Takeda, M.2
  • 6
    • 0036543139 scopus 로고    scopus 로고
    • Synthesis of longitudinal coherence functions by spatial modulation of an extended light source: A new interpretation and experimental verifications
    • W. Wang, H. Kozaki, J. Rosen, and M. Takeda, "Synthesis of longitudinal coherence functions by spatial modulation of an extended light source: a new interpretation and experimental verifications," Appl. Opt. 41, 1962-1971 (2002).
    • (2002) Appl. Opt. , vol.41 , pp. 1962-1971
    • Wang, W.1    Kozaki, H.2    Rosen, J.3    Takeda, M.4
  • 7
    • 0000153112 scopus 로고    scopus 로고
    • General theorem of spatial coherence: Application to three dimensional imaging
    • J. Rosen and A. Yariv, "General theorem of spatial coherence: application to three dimensional imaging," J. Opt. Soc. Am. A 13, 2091-2095 (1996).
    • (1996) J. Opt. Soc. Am. A , vol.13 , pp. 2091-2095
    • Rosen, J.1    Yariv, A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.