Source collection optics for EUV lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5533, Issue , 2004, Pages 145-156

  Marczuk, Piotr ^a   Egle, Wilhelm ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTRODES; INTEGRATED CIRCUITS; LIGHT SOURCES; PHOTOLITHOGRAPHY; PHOTONS;

GEOMETRICAL SHIELDING; LIGHT EMITTING PLASMAS; PROJECTION OPTICS; WAFER STEPPER;

OPTICS;

EID: 15744384082     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.549409     Document Type: Conference Paper

References (14)

1. G. E. Moore, "Cramming more components onto integrated circuits" Electronics, 38 (1965)
2. G. Derra and W. Singer, "Collection efficiency of EUV sources", Proc. SPIE 5037, 728 (2003)
3. W. J. Egle et al: "EUV collectors: design, development, fabrication and testing", Proc. SPIE 5193, 39 (2003)
4. D. de Chambure et al.: "The status of the flight X-ray mirror production for the XMM spacecraft", Proc. SPIE 3114, 113 (1997)
5. R. Hudec et al.: "Replicated grazing incidence X-ray optics: past, present and future", Proc. SPIE 3766, 62 (1999)
6. W. J. Egle et al.: "Mirror system for the German X-ray satellite ABRIXAS: Design and mirror development", Proc. SPIE 3444, 359 (1998)
7. J. van Casteren: "XMM, a large telescope", Proc. SPIE 2808, 338 (1996)
8. R. Petre et al.: "Segmented X-ray mirror development for Constellation-X", Proc. SPIE 3766, 11 (1999)
9. P. Friedrich et al.: "ABRIXAS: an imaging X-ray survey in the 0.5 to 10 keV range", Proc. SPIE 3444, 342 (1999)
10. J. Altmann et al.: "Mirror system for the German X-ray satellite ABRIXAS: Flight mirrors fabrication, integration and testing", Proc. SPIE 3444, 350 (1998)
11. W. J. Egle et al.: "Production and testing of development mandrels for Constellation-X", Proc. SPIE 4012 (2000)
12. W. J. Egle et al.: "ABRIXAS mirror system: Mirror modules testing and integration in the ABRIXAS satellite, Proc. SPIE 3766, 2 (1999)
13. B.L. Henke, E.M. Gullikson, and J.C. Davis, "X-ray interactions: photoabsorption, scattering, transmission, and reflection at E=50-30000 eV, Z=1-92", Atomic Data and Nuclear Data Tables 54(2), 181 (1993).
14. nd 2004, Santa Clara, USA