EUV collectors: Design, development, fabrication and testing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5193, Issue , 2004, Pages 39-49

  Egle, Wilhelm ^a   Hafner, Wolfgang ^a   Matthes, Axel ^a   Erzin, Eral ^a   Gänswein, Bernhard ^a   Schwarz, Herbert ^a   Marczuk, Piotr ^a   Antoni, Martin ^a   Singer, Wolfgang ^a   Melzer, Frank ^a   Hainz, Joachim ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

EUV sources; Grazing incidence optics; Soft X ray imaging; Wolter type 1 optics

Indexed keywords

FOCUSING; IMAGING TECHNIQUES; LIGHT REFLECTION; MIRRORS; PHOTONS; PLASMAS; ULTRAVIOLET RADIATION; X RAYS;

EXTREME ULTRAVIOLET (EUV) SOURCES; GRAZING INCIDENCE OPTICS; SOFT X-RAY IMAGING; WOLTER TYPE 1 OPTICS;

LITHOGRAPHY;

EID: 11144356834     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.507736     Document Type: Conference Paper

References (10)

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