The stability of SiO2 films prepared using a magnetron sputter type negative ion source (MSNIS)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 229, Issue 1, 2005, Pages 85-91

  Paik, Namwoong ^a  

^a Plasmion Corporation   (United States)

Author keywords

Aging; Negative ion source; SiO2

Indexed keywords

AGING OF MATERIALS; ATOMIC FORCE MICROSCOPY; ION SOURCES; MAGNETRON SPUTTERING; REFRACTIVE INDEX; SILICA; SURFACE PROPERTIES; ULTRAVIOLET SPECTROMETERS;

AGING; DIRECT ION BEAM DEPOSITION (DIBD); NEGATIVE ION SOURCE; SIO2;

THIN FILMS;

EID: 15744374598     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.11.004     Document Type: Article

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