Low loss tungsten-based electrode technology for microwave frequency BST varactors

Journal of Electroceramics

Volumn 14, Issue 1, 2005, Pages 75-81

  Maria, J P ^a   Boyette, B ^a   Kingon, A ^a   Ragaglia, C ^b   Stauf, G ^b  

^a North Carolina State University   (United States)

^b Advanced Technology Materials Inc   (United States)

Author keywords

BST; Electrode; Ferroelectric; Metallization; Microwave

Indexed keywords

BARIUM COMPOUNDS; DEPOSITION; ELECTRODES; FERROELECTRIC CERAMICS; METALLIZING; MICROWAVES; SEMICONDUCTOR MATERIALS; TRANSITION METALS; TUNGSTEN;

BST; MICROWAVE FREQUENCY; MULTILAYER STACKS; RESIDUAL STRAIN;

VARACTORS;

EID: 15544383658     PISSN: 13853449     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10832-005-6587-z     Document Type: Article

References (10)

1. R.A. York, A.S. Nagra, P. Periaswamy, O. Auciello, and S.K. Streiffer, J. Im, Int. Ferro., 34(1-4), 1617 (2001).
2. K. Bethe and F. Welz, Mater. Res. Bull., 6(4), 209 (1971).
3. D.C. Dube, J. Baborowski, P. Muralt, and N. Setter, Appl. Phys. Lett., 74(25), 3546 (1999).
4. H.N. Al-Shareef, K.D. Gifford, S.H. Rou, P.D. Hren, O. Auciello, and A.I. Kingon, Integr. Ferroelectr., 3(4), 321 (1993).
5. E.A. Brandes and G.B. Brook, in Smithells Metals Reference Book, 7th ed. (Butterworth and Heinemann, Oxford, England, 1992) Chap. 14.
6. T.B. Massalski, Binary Alloy Phased Diagrams (ASM International, U.S.A., 1996).
7. I. Barin and O. Knacke, Thermochemical Properties of Inorganic Substances (Springer-Verlag, Dusselforf, GDR, 1973).
8. S. Bilodeau et al., Solid State Tech., 40(7), 235 (1997).
9. C.B. Parker, J.-P. Maria, and A.I. Kingon, Appl. Phys. Lett., 81(2), 340 (2002).
10. G.T. Stauf, C. Ragaglia, J.F. Roeder, D. Vestyck, J.-P. Maria, T. Ayguavives, A. Kingon, A. Mortazawi, and A. Tombak, Int. Ferro., 39(1-4), 1271 (2001).