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Volumn 1999-W, Issue , 1999, Pages 129-135

MESO-SCALE ELECTROMAGNETIC ACTUATORS FABRICATED IN LOW-TEMPERATURE CO-FIRED CERAMIC TAPES

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; IRON ALLOYS; MAGNETIC ACTUATORS; MAGNETIC MATERIALS; NEODYMIUM ALLOYS; NICKEL ALLOYS; PERMANENT MAGNETS; POLYIMIDES; TEMPERATURE;

EID: 1542697028     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1999-0257     Document Type: Conference Paper
Times cited : (7)

References (10)
  • 2
    • 0026882942 scopus 로고
    • The case for Magnetically Driven Microactuators
    • Busch-Vishniac, I. J., 1992, “The case for Magnetically Driven Microactuators,” Sensors and Actuators A, 33, pp. 207-220.
    • (1992) Sensors and Actuators A , vol.33 , pp. 207-220
    • Busch-Vishniac, I. J.1
  • 4
    • 0031237318 scopus 로고    scopus 로고
    • Magnetically actuated, addressable microstructures
    • Judy J. W., Muller, R. S., 1997, “Magnetically actuated, addressable microstructures,” IEEE Journal, of MEMS, pp. 249-256.
    • (1997) IEEE Journal, of MEMS , pp. 249-256
    • Judy, J. W.1    Muller, R. S.2
  • 5
    • 0032290649 scopus 로고    scopus 로고
    • The Fabrication of Flow Conduits in Ceramic Tape and the Measurement of Fluid Flow Through These Conduits
    • Yi. M., and, (DSC-Vol), International Mechanical Engineering Conference and Exposition
    • Kim, M., Yi. M., Zhong, J., Bau, H. H., Hu, H., and Ananthasuresh, G. K., “The Fabrication of Flow Conduits in Ceramic Tape and the Measurement of Fluid Flow Through These Conduits,” in Micro-Electro-Mechanical Systems (DSC-Vol. 66), 1998, International Mechanical Engineering Conference and Exposition, pp. 171-177.
    • (1998) Micro-Electro-Mechanical Systems , vol.66 , pp. 171-177
    • Kim, M.1    Zhong, J.2    Bau, H. H.3    Hu, H.4    Ananthasuresh, G. K.5
  • 6
    • 0033101284 scopus 로고    scopus 로고
    • Magnetic Microactuators Based on Polymer Magnets
    • I
    • Lagorce, L. K., Brand, O., Allen, M. G., 1999, “Magnetic Microactuators Based on Polymer Magnets,” IEEE Journal, of MEMS, Vol. 8, No. I, pp. 2-9.
    • (1999) IEEE Journal, of MEMS , vol.8 , pp. 2-9
    • Lagorce, L. K.1    Brand, O.2    Allen, M. G.3
  • 8
    • 0010816128 scopus 로고    scopus 로고
    • Electromagnetic MEMS Scanning Mirrors For Holographic Data Storage
    • Miller, R. A., Burr, G. W., Tai, Y-C, Psaltis, D., 1996, “Electromagnetic MEMS Scanning Mirrors For Holographic Data Storage,” Hilton Head Workshop, pp. 183-186.
    • (1996) Hilton Head Workshop , pp. 183-186
    • Miller, R. A.1    Burr, G. W.2    Tai, Y-C3    Psaltis, D.4
  • 10
    • 0025723096 scopus 로고
    • Microfabricated Actuator With Moving Permanent Magnet
    • W., in Nara, Japan
    • Wagner, B., Benecke, 1991, W., “Microfabricated Actuator With Moving Permanent Magnet,” in Proc. 1991 IEEE MEMS Conf, Nara, Japan, pp. 27-32.
    • (1991) Proc. 1991 IEEE MEMS Conf , pp. 27-32
    • Wagner, B.1    Benecke2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.