Simulation of scanning tunneling microscope interaction with resists

Applied Physics Letters

Volumn 68, Issue 25, 1996, Pages 3653-3655

  Dobisz, E A ^a   Koops, H W P ^b   Perkins, F K ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1542629395     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115760     Document Type: Article

References (14)

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3. D. M. Eigler and E. I. Schweizer, Nature 344, 524 (1991); I.-W. Lyo and P. Avouris, Science 253, 173 (1991); M. Aono, A. Kobayashi, F. Grey, H. Uchida, and D.-H. Huang, Jpn. J. Appl. Phys. 32, 1470 (1993).
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7. R. Gomer, Field Emission and Field Ionization (Institute of Physics, New York, 1993), p. 9.
8. A good review is given in the book in Ref. 7.
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